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M Byerly

Difference in peaks in EDS and XPS spectra

Alexander Abney-King  Follow

The two techniques are used for different purposes.

EDS - Is a "bulk" analysis technique.

  • Since the exciting electron is of high energy it penetrates relatively deeply into the sample.

  • The emitted x-rays have a characteristic energy which is unaffected by the chemical bonding. (There is some effect due to bonding of course, but the difference in energy is infinitesimally small and hence insignificant.)

  • High energy x-rays can escape through the sample to a "great" depth.

XPS is a surface analysis technique.

  • Exciting electrons of low energy and only penetrate the surface layers of the sample.

  • The bonding energies of the valence electrons are low in energy.

  • The emitted electrons have a low energy (few eV) and hence don't penetrate out of the sample except for the surface layers.

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