Got data to post? What resolution? What material? What wavelength composition? What material? Etc. :-) Post all the details for the best feedback from RG expertise. P.S.: There are up to 15 topics that may be included in your question besides the selected 1 up top in the question. Please refer to the question noted below for examples of relevant topics to include in order to get the best circulation and responses from the RG expertise. https://www.researchgate.net/post/How_do_I_figure_out_the_film_thickness_of_the_individual_layer_spatially_from_these_diffractograms
Got data to post? What resolution? What material? What wavelength composition? What material? Etc. :-) Post all the details for the best feedback from RG expertise. P.S.: There are up to 15 topics that may be included in your question besides the selected 1 up top in the question. Please refer to the question noted below for examples of relevant topics to include in order to get the best circulation and responses from the RG expertise. https://www.researchgate.net/post/How_do_I_figure_out_the_film_thickness_of_the_individual_layer_spatially_from_these_diffractograms
Hi i think you have already found some answers. Some extra things that i would like to add is, you can measure the film thicknesses in the range 100-200 nm but the interface roughness should not be more than 2-3 nm. Below i have attached webinar document that you can read for more knowledge...
Hi i think you have already found some answers. Some extra things that i would like to add is, you can measure the film thicknesses in the range 100-200 nm but the interface roughness should not be more than 2-3 nm. Below i have attached webinar document that you can read for more knowledge...
Dear Petru Lunca-Popa, As Claudia Cancellieri mentioned, the incident angle should not be fixed after alignment is true. I wonder you are measuring it correct but you are unable to find fringes, because of high thickness of the film. XRR is not suitable for film thickness (above ~80 nm). May be your film thickness is too high for XRR to get interference fringes. You can check this from the critical angle of your XRR data. You can check the critical angle value, and check whether it matches with critical angle of substrate (Si in your case) or with the critical angle of the film you deposited. Thanks: Amol
Dear Petru Lunca-Popa, As Claudia Cancellieri mentioned, the incident angle should not be fixed after alignment is true. I wonder you are measuring it correct but you are unable to find fringes, because of high thickness of the film. XRR is not suitable for film thickness (above ~80 nm). May be your film thickness is too high for XRR to get interference fringes. You can check this from the critical angle of your XRR data. You can check the critical angle value, and check whether it matches with critical angle of substrate (Si in your case) or with the critical angle of the film you deposited. Thanks: Amol
I think you should first run an approximate calculation in order to find out if you can expect distinct fringes for your sample and the photon energy of your instrument. You can do this very easily at the link provided. This will also help you to assess the angular step width at which you should measure and what resulting XRR curve you should expect. Of what material is your thin film? http://henke.lbl.gov/optical_constants/layer2.html
I think you should first run an approximate calculation in order to find out if you can expect distinct fringes for your sample and the photon energy of your instrument. You can do this very easily at the link provided. This will also help you to assess the angular step width at which you should measure and what resulting XRR curve you should expect. Of what material is your thin film? http://henke.lbl.gov/optical_constants/layer2.html
The XRR measurement should be performed in a coupled geometry of theta-2theta. So once you finished the alignment, the incident angle should not be fixed anymore. The alignment step of omega =0.2 and 2theta =0.4 is indeed to check the correct coupling between the 2 angles ..
The XRR measurement should be performed in a coupled geometry of theta-2theta. So once you finished the alignment, the incident angle should not be fixed anymore. The alignment step of omega =0.2 and 2theta =0.4 is indeed to check the correct coupling between the 2 angles ..
Got Bruker LEPTOS? See example for NIST 2000 Standard Reference Material specimen:
https://www.researchgate.net/post/What_depths_can_one_typically_probe_with_XRR_X-ray_Reflectivity_Reflectometery
Got data to post? What resolution? What material? What wavelength composition? What material? Etc. :-) Post all the details for the best feedback from RG expertise.
P.S.: There are up to 15 topics that may be included in your question besides the selected 1 up top in the question. Please refer to the question noted below for examples of relevant topics to include in order to get the best circulation and responses from the RG expertise.
https://www.researchgate.net/post/How_do_I_figure_out_the_film_thickness_of_the_individual_layer_spatially_from_these_diffractograms
Got Bruker LEPTOS? See example for NIST 2000 Standard Reference Material specimen:
https://www.researchgate.net/post/What_depths_can_one_typically_probe_with_XRR_X-ray_Reflectivity_Reflectometery
Got data to post? What resolution? What material? What wavelength composition? What material? Etc. :-) Post all the details for the best feedback from RG expertise.
P.S.: There are up to 15 topics that may be included in your question besides the selected 1 up top in the question. Please refer to the question noted below for examples of relevant topics to include in order to get the best circulation and responses from the RG expertise.
https://www.researchgate.net/post/How_do_I_figure_out_the_film_thickness_of_the_individual_layer_spatially_from_these_diffractograms
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VOTE
Hi i think you have already found some answers. Some extra things that i would like to add is, you can measure the film thicknesses in the range 100-200 nm but the interface roughness should not be more than 2-3 nm. Below i have attached webinar document that you can read for more knowledge...
Hi i think you have already found some answers. Some extra things that i would like to add is, you can measure the film thicknesses in the range 100-200 nm but the interface roughness should not be more than 2-3 nm. Below i have attached webinar document that you can read for more knowledge...
More
VOTE
Dear Petru Lunca-Popa,
As Claudia Cancellieri mentioned, the incident angle should not be fixed after alignment is true. I wonder you are measuring it correct but you are unable to find fringes, because of high thickness of the film. XRR is not suitable for film thickness (above ~80 nm). May be your film thickness is too high for XRR to get interference fringes. You can check this from the critical angle of your XRR data. You can check the critical angle value, and check whether it matches with critical angle of substrate (Si in your case) or with the critical angle of the film you deposited.
Thanks:
Amol
Dear Petru Lunca-Popa,
As Claudia Cancellieri mentioned, the incident angle should not be fixed after alignment is true. I wonder you are measuring it correct but you are unable to find fringes, because of high thickness of the film. XRR is not suitable for film thickness (above ~80 nm). May be your film thickness is too high for XRR to get interference fringes. You can check this from the critical angle of your XRR data. You can check the critical angle value, and check whether it matches with critical angle of substrate (Si in your case) or with the critical angle of the film you deposited.
Thanks:
Amol
More
VOTE
Thank you for all answers. I think my problem is related to the huge roughness of the films.
Thank you for all answers. I think my problem is related to the huge roughness of the films.
More
VOTE
I think you should first run an approximate calculation in order to find out if you can expect distinct fringes for your sample and the photon energy of your instrument. You can do this very easily at the link provided.
This will also help you to assess the angular step width at which you should measure and what resulting XRR curve you should expect.
Of what material is your thin film?
http://henke.lbl.gov/optical_constants/layer2.html
I think you should first run an approximate calculation in order to find out if you can expect distinct fringes for your sample and the photon energy of your instrument. You can do this very easily at the link provided.
This will also help you to assess the angular step width at which you should measure and what resulting XRR curve you should expect.
Of what material is your thin film?
http://henke.lbl.gov/optical_constants/layer2.html
More
VOTE
The XRR measurement should be performed in a coupled geometry of theta-2theta. So once you finished the alignment, the incident angle should not be fixed anymore.
The alignment step of omega =0.2 and 2theta =0.4 is indeed to check the correct coupling between the 2 angles ..
The XRR measurement should be performed in a coupled geometry of theta-2theta. So once you finished the alignment, the incident angle should not be fixed anymore.
The alignment step of omega =0.2 and 2theta =0.4 is indeed to check the correct coupling between the 2 angles ..
More
VOTE