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CAS NO 4109-96-0 Dichlorosilane high purity

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CAS No.:

4109-96-0

Grade:

industrial Grade

Content:

90%

Port:

qingdao

Brand:

HLY

Packaging:

50L seamless steel cylinders

Sample Available:

Yes

Price valid (until):

2027-02-28

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Suqian City Hengliyuan Import and Export Trade Co., LTD

Company Type:

Trader

Location:

China

Payment Terms:

TT against B/L draft before shipment,100% TT in advance

Average Lead Time:

30 days

Qualification:

Main Products:

Acrylonitrile,Sodium biselenite methylamine solution,Methylamine [anhydrous],Zinc dust,Hydrogen peroxide solution [content >8%],Triisopropyl borate

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Company Profile ----------
Suqian City Hengliyuan Import and Export Trade Co., LTD is a trading company. The company has introduced advanced scientific and technological achievements from home and abroad, and has superior products from well-known manufacturers at home and abroad. The basic functions are:
1. Domestic trade of various chemical raw materials;
2. Providing price information services and chemical raw material procurement for industrial enterprises;
3. Cooperating with Chinese state-owned enterprise factories, the price and quality are very advantageous.
At present, the company is relying on the combination of industry and trade and global procurement to steadily improve the company's value-added ability and compound competitiveness. We have always been committed to producing high-quality and low-cost goods, so we have been sincerely recognized by many customers. Our goal is to produce the best products and satisfy every customer with professional services and attitudes. We look forward to cooperating with you and establishing a win-win relationship with you. Please rest assured that we will definitely satisfy you.

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High quality with competitive price
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2) All Purity≥99%
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Dichlorosilane (DCS)

CAS No.: 4109-96-0

1. Basic Identification

Chemical Name: Dichlorosilane
IUPAC Name: Silane, dichloro-
Abbreviation: DCS
Synonyms: Dihydridodichlorosilane, Dichloromonosilane
MDL No.: MFCD00011600
Molecular Formula: $\boldsymbol{SiH_2Cl_2}$
Molecular Weight: 101.01
SMILES: ClSiCl
UN Number: UN 2189
HS Code: 28121090
Hazard Classification: Class 2.3 Toxic Gas, subsidiary risks Class 2.1 Extremely Flammable Gas & Class 8 Corrosive Substance
Category: Ultra-high purity electronic chlorosilane, silicon precursor for semiconductor & PV industry

2. Physical & Chemical Properties

Appearance

Colorless liquefied gas with sharp pungent acid odor; volatile at normal temperature, heavier than air, fumes violently in humid air.

Physical Constants

Parameter	Standard Value	Remarks
Melting Point	-122 ℃	Cryogenic liquid under pressurized storage
Boiling Point	8.3 ℃ (760 mmHg)	Very low boiling point, easily vaporizes at ambient temp
Relative Density (liquid, 20 ℃)	1.22 g/cm³	Liquid heavier than water
Gas Vapor Density (air=1)	3.5	Sinks to low ground, accumulates in confined spaces
Closed Cup Flash Point	-37 ℃	Extremely pyrophoric & flammable
Explosion Limit in Air (V/V)	2.5% ~ 80%	Ultra-wide explosive range, extreme explosion hazard
Vapor Pressure (20 ℃)	1254 mmHg / 1.6 bar	High vapor pressure, stored in pressure cylinders
Water Reaction	Reacts violently & exothermically, instantly decomposes to HCl + silica fumes
Organic Solvent Miscibility	Miscible with anhydrous benzene, ether, chloroform; reacts with alcohols

Core Chemical Characteristics

Strong hydrolysis reactivity

Contact with trace atmospheric moisture triggers instantaneous violent reaction, releases corrosive hydrogen chloride white smoke; strict anhydrous, inert gas sealed operation required.
Ultra-wide flammable range & pyrophoric risk

Spontaneously ignites at high concentration in air; tiny ignition source causes severe explosion; must be handled under nitrogen/hydrogen blanketing.
Silicon source for low-temperature epitaxy

Higher silicon content than trichlorosilane (TCS); enables low-temperature epitaxial silicon growth with high deposition efficiency and fewer defects.
CVD thin film precursor

Decomposes under thermal/plasma conditions to deposit monocrystalline silicon, poly-Si, Si₃N₄, SiO₂, SiGe thin films for wafers and photovoltaic cells.
Strong corrosivity

Hydrolysis-generated HCl severely corrodes carbon steel, copper, aluminum; only Hastelloy, stainless steel, PTFE, quartz containers are compatible.
Incompatible hazardous materials: Water, alcohols, strong oxidants, strong alkalis, air, moisture, metal powders.

3. Electronic Grade Quality Specifications (UHP Semiconductor Grade)

Test Item	Standard Spec	Test Method
Dichlorosilane Purity	≥99.9999% (6N)	GC-MS / FTIR
Total Metal Impurities (Fe, Al, Cu, Cr, Ni)	≤1 ppb	ICP-MS
Moisture (H₂O)	≤50 ppb	Trace moisture analyzer
Free Chlorine / HCl	≤10 ppb	Ion chromatography
Hydrocarbon Impurities (CH₄, C₂H₆)	≤20 ppb	GC
Other Silanes (SiH₄, SiHCl₃, SiCl₄)	≤100 ppb	GC-MS
Particle Count (≥0.1μm)	≤0.1 pcs/L	Laser particle counter
Appearance	Colorless transparent liquefied gas, no visible suspended particles	Visual Inspection

4. Main Industrial Applications

4.1 Semiconductor Wafer Manufacturing (Core High-Value Field)

Epitaxial silicon growth precursor: Low-temperature deposition of monocrystalline silicon epitaxial layers on silicon wafers for power devices, logic chips, memory wafers; faster deposition speed and lower defect density vs TCS.
CVD thin film deposition: Source gas for silicon nitride, silicon oxide, silicon germanium passivation & dielectric layers.
Ultra-thin polycrystalline silicon film deposition for gate electrodes.

4.2 Photovoltaic (PV) Solar Cell Production

Polycrystalline silicon thin film deposition for thin-film solar panels.
Surface passivation layer precursor to improve cell conversion efficiency.

4.3 Advanced Microelectronics & Display Industry

Precursor for amorphous silicon & IGZO thin-film transistor (TFT) layers in OLED/LCD panels.
Metal silicide barrier film deposition for chip packaging.

4.4 Fine Organosilicon Synthesis

Specialized laboratory raw material for synthesis of ultra-high purity organosilicon monomers under strictly anhydrous inert atmosphere.

5. Toxicology, Health Hazards & First Aid

Toxicity Profile

Inhalation LC50 (rat, short-term): Extremely toxic (Hazard Zone B inhalation hazard)
Primary hazards: Inhalation toxicity, severe corrosive burns, pyrophoric explosion risk
Chronic hazard: Repeated inhalation causes permanent pulmonary fibrosis, corneal scarring, skin chemical ulceration

Exposure Symptoms

Inhalation: Immediate severe throat/lung burning, violent cough, chest pain, dyspnea; high concentration leads to fatal pulmonary edema.
Skin contact: Liquefied gas causes cryogenic frostbite plus chemical corrosion blisters, deep tissue ulceration.
Eye contact: Instant corneal erosion, irreversible vision damage without emergency flushing.
Skin absorption / ingestion: Not typical under normal handling; hydrolysis HCl causes systemic acid poisoning.

Complete First-Aid Procedures

Inhalation: Evacuate victim to fresh air, rest upright, supply 100% oxygen; emergency hospital treatment for pulmonary edema prophylaxis.
Skin Contact: Immediately remove contaminated protective gear; flush affected skin with massive running cold water for ≥30 minutes; treat frostbite & chemical burn simultaneously.
Eye Contact: Force eyelids open, continuously irrigate eyes with large-volume sterile cold water for minimum 30 minutes; urgent ophthalmic intervention.
Liquid Splashing on Body: Neutralize dilute mist with sodium carbonate water spray; avoid direct contact with raw DCS liquid.

6. Storage, Handling & Incompatibility Rules

Mandatory Storage Conditions

Warehouse classification: Special pressurized toxic & flammable gas cylinder warehouse, fully isolated from water sources, oxidants, alkalis, food materials.
Temperature control: Ambient storage ≤25 ℃, full shading away from direct sunlight and heat sources; cylinder insulated to prevent overpressure.
Atmosphere control: Storage room maintained under slight nitrogen positive pressure to exclude air/moisture; equipped with HCl & flammable gas continuous leakage alarms.
Cylinder requirements: Dedicated seamless steel pressure cylinders with Hastelloy valves, PTFE seals; cylinders secured with anti-tip chains, separate storage for full/empty cylinders.
Shelf life: 12 months for sealed UHP cylinders; discard if valve leakage or moisture contamination detected.

Strictly Separated Incompatible Materials

Water, steam, alcohols, strong oxidants (Cl₂, H₂O₂, permanganate), concentrated acids/alkalis, air, metal powders, combustible organics.

Safe Operation Specifications

Operators wear full-body cryogenic & acid-resistant chemical suit, pressure-resistant gas-tight full-face respirator, cold-resistant anti-corrosion gloves, safety boots; all operations inside fully sealed nitrogen-purged glove box or negative pressure gas cabinet.
All piping, valves, pressure gauges made of 316L stainless steel / Hastelloy, fully passivated & leak-tested before use; static grounding for all equipment.
Small leakage: Cut gas supply immediately, dilute & neutralize fumes with dry sodium carbonate powder, ventilate fully; isolate cylinder for professional recovery.
Large cylinder rupture/spill: Evacuate all personnel upwind, cut all ignition sources, suppress vapor spread with water mist (avoid direct liquid contact), notify hazardous gas emergency response team.

7. Export Packaging & Global Transportation Regulations

Standard Export Packaging Modes

Standard industrial / electronic grade: Seamless high-pressure steel cylinders (40L / 47L / 80L), valve with safety burst disc, nitrogen pre-purged before filling.
Bulk transport: Special insulated cryogenic tank containers with inert gas blanketing system.

UN Transport Compliance Rules

UN 2189, Class 2.3 Toxic Gas, Subsidiary Risk 2.1 Flammable Gas + 8 Corrosive Substance, Hazard Zone B

Road transport: Special toxic gas tank trucks/cylinder racks, equipped with gas leakage detectors, dry powder & CO₂ fire extinguishers, full static grounding, explosion-proof electrical systems.
Ocean shipment: Comply with IMDG Code for toxic flammable compressed gas; affix Toxic Gas, Flammable Gas & Corrosive triple hazard labels; stowed in segregated, ventilated dangerous goods hold, away from food, oxidants, water reactive chemicals.
Loading ban: Strictly prohibited mixed loading with water-reactive substances, oxidants, alkaline chemicals, edible goods.

Full Export Document Package

UHP Gas Certificate of Analysis (COA)
GHS-compliant MSDS / SDS
Technical Data Sheet (TDS)
IMDG Marine Dangerous Goods Declaration
Toxic & Flammable Gas Hazard Classification Certificate
REACH Registration Report

8. GHS Global Hazard Label Statements

Signal Word: Danger

Hazard Statements:

H220 Extremely flammable gas

H260 In contact with water releases flammable, corrosive gases which may ignite spontaneously

H330 Fatal if inhaled

H314 Causes severe skin burns and eye damage

H280 Contains gas under pressure; may explode if heated

Precautionary Statements:

P210 Keep away from heat, sparks, open flames, hot surfaces – No smoking

P222 Do not allow contact with air / moisture

P260 Do not breathe gas/vapor

P280 Wear gas-tight respirator, full protective suit, gloves and eye/face protection

P304+P340 IF INHALED: Remove victim to fresh air and keep at rest in a position comfortable for breathing

P305+P351+P338 IF IN EYES: Rinse continuously with water for many minutes

P403+P235 Store in a cool, well-ventilated place; keep cylinder tightly closed under inert gas

P410+P403 Protect from sunlight and store in a well-ventilated place

9. Fire Emergency Disposal Plan

Approved Fire Extinguishing Agents

Primary: Dry chemical powder, carbon dioxide (CO₂)
Auxiliary: Fine water mist (only to cool cylinders & suppress vapor; never spray direct liquid water onto leaking DCS)

Forbidden Agents

Large-volume direct water jet, foam extinguishers (water triggers violent hydrolysis & explosion)

Fire Site Operation Steps

Immediate full evacuation of all personnel to upwind safe zone, isolate hazard radius ≥500 meters, cut all ignition sources, block gas cylinder supply valves if safe to approach.
Continuously cool all exposed cylinders with water mist to prevent pressure rupture from thermal overheating; do not attempt to stop gas flow if cylinder valve is damaged.
Neutralize corrosive HCl vapor with dry alkaline powder; all fire residues & waste must be treated as highly toxic corrosive hazardous waste for centralized professional disposal.

10. Printable Export COA Template (6N Electronic Grade)

CERTIFICATE OF ANALYSIS

Product Name: Ultra High Purity Dichlorosilane (DCS)

CAS No.: 4109-96-0

Grade: Semiconductor 6N Electronic Grade

Batch No.: ____________

Cylinder No.: ____________

Net Filling Weight: ____________ kg

Manufacture Date: ____________

Test Item	Standard Spec	Test Method
Dichlorosilane Main Purity	≥99.9999%	GC-MS
Total Metallic Impurities (Fe, Al, Cu, Cr, Ni)	≤1 ppb	ICP-MS
Trace Moisture (H₂O)	≤50 ppb	Trace Moisture Analyzer
Free HCl / Cl₂	≤10 ppb	Ion Chromatography
Light Hydrocarbon Impurities	≤20 ppb	GC
Other Chlorosilane Impurities (SiH₄, TCS, STC)	≤100 ppb	GC-MS
Particle Count (≥0.1μm)	≤0.1 pcs/L	Laser Particle Counter
Appearance	Colorless clear liquefied gas, no suspended particles	Visual Inspection

Conclusion: This batch complies with international SEMI standard for 6N ultra-high purity electronic grade Dichlorosilane.

Inspector Signature: ____________

Issuance Date: ____________

11. E-commerce Listing Copy (For Electronic Chemical Platforms)

Product Title

Ultra High Purity Dichlorosilane DCS CAS 4109-96-0 6N Electronic Grade Toxic Flammable Corrosive Compressed Gas Si Precursor for Semiconductor Epitaxial Silicon PV Thin Film Deposition

Short Description

Dichlorosilane (SiH₂Cl₂, CAS 4109-96-0) 6N ultra-high purity liquefied compressed gas, triple hazards of toxic, extremely flammable and corrosive. Key low-temperature silicon source for semiconductor wafer epitaxial silicon growth, SiN/SiO₂ CVD thin film deposition and photovoltaic poly-Si thin-film cell manufacturing. Complete UN2189 dangerous gas export documents including COA, MSDS and TDS available for global bulk cylinder shipment.

Full Description

Dichlorosilane (abbreviated DCS, CAS 4109-96-0) is a high-value ultra-pure chlorosilane electronic gas supplied as colorless pressurized liquefied gas with minimum 99.9999% purity (6N). Featuring higher silicon mass fraction and lower epitaxy temperature compared with trichlorosilane, DCS achieves high-speed, low-defect monocrystalline silicon epitaxy for advanced power semiconductors, memory and logic chips.

Core downstream application sectors: epitaxial silicon layer deposition on 8/12-inch silicon wafers for semiconductor manufacturing; CVD precursor for silicon nitride, silicon oxide passivation dielectric films; polycrystalline/amorphous silicon thin film source for photovoltaic solar panels and OLED/LCD TFT display substrates; specialized anhydrous lab synthesis raw material for organosilicon R&D. We supply standard 6N semiconductor grade and customized ultra-low metal trace special grade for advanced fab processes, packed in passivated stainless steel pressure cylinders.

Classified as UN2189 Class 2.3 toxic compressed gas with subsidiary flammable & corrosive risks, we provide full set of official customs clearance, IMDG transport and REACH compliance certificates for long-term stable global delivery to semiconductor and PV manufacturers.

ECHEMI Editorial Reference

colourless gas
Dichlorosilane is a flammable and poisonous gas, with a strong repulsive odor. It is easily ignited in air, reacts with oxidizing agents, is very toxic by inhalation, and is a strong irritant to skin, eyes and mucous membranes. Under prolonged exposure to fire or intense heat the container may rupture violently or rocket.|GasVapor; Liquid|COLOURLESS GAS WITH CHARACTERISTIC ODOUR.
Dichlorosilane is a flammable and poisonous gas, with a strong repulsive odor. It is easily ignited in air, reacts with oxidizing agents, is very toxic by inhalation, and is a strong irritant to skin, eyes and mucous membranes. Under prolonged exposure to fire or intense heat the container may rupture violently or rocket.

Certificates

Basic Info

Product Name:

Dichlorosilane

Other Name:

Silane,dichloro-;Dichlorosilane;Silicon chloride hydride (SiH2Cl2);Silicon chloride hydride (SiCl2H2);Dichlorosilane(SiH2Cl2);Silicon chloride hydride (Cl2H2Si);438546-17-9

CAS No.:

4109-96-0

Molecular Formula:

Cl2H2Si

InChIKeys:

InChIKey=MROCJMGDEKINLD-UHFFFAOYSA-N

Molecular Weight:

101.01

Exact Mass:

101.01

EC Number:

223-888-3

ICSC Number:

0442

UN Number:

2189

DSSTox ID:

DTXSID1052082

Categories:

Inorganic Salts

Characteristics

PSA:

XLogP3:

0.46280

Appearance:

Dichlorosilane is a flammable and poisonous gas, with a strong repulsive odor. It is easily ignited in air, reacts with oxidizing agents, is very toxic by inhalation, and is a strong irritant to skin, eyes and mucous membranes. Under prolonged exposure to fire or intense heat the container may rupture violently or rocket.

Density:

1.220 g/cm³ @ Temp: 7 °C

Melting Point:

-122 °C

Boiling Point:

8 °C

Flash Point:

-37°C

Water Solubility:

Decomposes in water

Vapor Pressure:

1254 mm Hg ( 20 °C)

Vapor Density:

3.5 (vs air)

Explosive limit:

99%

Air and Water Reactions:

Highly flammable. Based on the properties of similar materials, there is the possibility that the reaction of this compound with water may be vigorous or violent. Products of the reaction include hydrogen chloride. The reaction generates heat and this heat may be sufficient to ignite the product. The chlorosilicon hydrides(ClxSiHy) are spontaneously flammable in air, NFPA 1991.

Reactive Group:

Chlorosilanes

Reactivity Alerts:

Highly Flammable

Reactivity Profile:

Chlorosilanes, such as DICHLOROSILANE, are compounds in which silicon is bonded to from one to four chlorine atoms with other bonds to hydrogen and/or alkyl groups. Chlorosilanes react with water, moist air, or steam to produce heat and toxic, corrosive fumes of hydrogen chloride. They may also produce flammable gaseous H2. They can serve as chlorination agents. Chlorosilanes react vigorously with both organic and inorganic acids and with bases to generate toxic or flammable gases.

Physical Dangers:

The gas is heavier than air and may travel along the ground; distant ignition possible.

See More Dichlorosilane Properties 

Hazard Identification

Classification of the substance or mixture

Flammable gases, Category 1A, Flammable gas

Gases under pressure: Liquefied gas

Skin corrosion, Sub-category 1A

Serious eye damage, Category 1

Acute toxicity - Category 2, Inhalation

GHS label elements, including precautionary statements

Precautionary statement(s)
Pictogram(s)
Signal word	Danger
Hazard statement(s)	H220 Extremely flammable gas H280 Contains gas under pressure; may explode if heated H314 Causes severe skin burns and eye damage H330 Fatal if inhaled
Prevention	P210 Keep away from heat, hot surfaces, sparks, open flames and other ignition sources. No smoking. P260 Do not breathe dust/fume/gas/mist/vapours/spray. P264 Wash ... thoroughly after handling. P280 Wear protective gloves/protective clothing/eye protection/face protection/hearing protection/... P271 Use only outdoors or in a well-ventilated area. P284 [In case of inadequate ventilation] wear respiratory protection.
Response	P377 Leaking gas fire: Do not extinguish, unless leak can be stopped safely. P381 In case of leakage, eliminate all ignition sources. P301+P330+P331 IF SWALLOWED: Rinse mouth. Do NOT induce vomiting. P363 Wash contaminated clothing before reuse. P304+P340 IF INHALED: Remove person to fresh air and keep comfortable for breathing. P316 Get emergency medical help immediately. P321 Specific treatment (see ... on this label). P305+P351+P338 IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P305+P354+P338 IF IN EYES: Immediately rinse with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. P317 Get medical help. P320 Specific treatment is urgent (see ... on this label).
Storage	P403 Store in a well-ventilated place. P410+P403 Protect from sunlight. Store in a well-ventilated place. P405 Store locked up. P403+P233 Store in a well-ventilated place. Keep container tightly closed.
Disposal	P501 Dispose of contents/container to an appropriate treatment and disposal facility in accordance with applicable laws and regulations, and product characteristics at time of disposal.

Other hazards which do not result in classification

no data available

Handling and Storage

Precautions for safe handling

NO open flames, NO sparks and NO smoking. Closed system, ventilation, explosion-proof electrical equipment and lighting. Handling in a well ventilated place. Wear suitable protective clothing. Avoid contact with skin and eyes. Avoid formation of dust and aerosols. Use non-sparking tools. Prevent fire caused by electrostatic discharge steam.

Conditions for safe storage, including any incompatibilities

Fireproof. Keep in a well-ventilated room.

See More Dichlorosilane Safety Data Sheet 

Seller Information

Business Type:
Trader

Main Products:
Acrylonitrile,Sodium biselenite methylamine solution,Methylamine [anhydrous],Zinc dust,Hydrogen peroxide solution [content >8%],Triisopropyl borate

Location:
Shop No.15, 1st Floor, Building 12, Hengda Huafu, Sucheng District, Suqian City

Payment Terms:
TT against B/L draft before shipment,100% TT in advance

Average lead Time:
30 days

Total Annual Revenue:
Less than $1 million

Total Employees:
5-10

Year of Establishment:
2022
Company Overview

Suqian Hengliyuan Import and Export Corporation, Ltd. is a leading enterprise specializing in the international trade of chemical products. Established in Suqian, Jiangsu Province, China, our company has built a strong reputation for excellence and reliability in the chemical industry.

Our Mission

Our mission is to facilitate global trade by providing high-quality chemical products and exceptional service to our clients. We aim to be a bridge between manufacturers and end-users, ensuring the safe and efficient transfer of chemicals across borders.

Products and Services

We offer a comprehensive range of chemical products, including but not limited to:

Industrial Chemicals: Raw materials for various industries such as pharmaceuticals, agriculture, and manufacturing.

Specialty Chemicals: High-performance chemicals used in specific applications, including water treatment, coatings, and adhesives.

Bulk Chemicals: Large-volume chemicals for industrial processes and manufacturing needs.

Quality Assurance

At Suqian Hengliyuan Import and Export Corporation, Ltd., quality is our top priority. We adhere to stringent quality control measures and international standards to ensure that our products meet the highest levels of purity and performance. Our dedicated quality assurance team conducts rigorous inspections and testing to guarantee the integrity and safety of all our chemical products.

Global Network

Leveraging our extensive network of suppliers and partners, we are able to source and deliver a wide array of chemical products to clients worldwide. Our strategic partnerships and logistical expertise enable us to offer competitive pricing, timely delivery, and customized solutions to meet the diverse needs of our clients.

Commitment to Sustainability

We are committed to sustainable business practices and environmental stewardship. Our operations are designed to minimize environmental impact, and we continuously seek ways to improve our processes and reduce our carbon footprint. We work closely with our suppliers and customers to promote the responsible use and disposal of chemicals.

Customer Focus

Our clients are at the heart of everything we do. We pride ourselves on providing personalized service and building long-term relationships based on trust and mutual benefit. Our experienced team of professionals is dedicated to understanding our clients' needs and delivering solutions that exceed their expectations.
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