Heat transfer fluids Enasolv HT Series heat transfer fluorinated liquid

FEATURES

BENEFITS

• High boiling point with low pour point and low viscosity

• Low evaporation losses

• Wide choice of grades to optimize performance

• Use of high boiling grades to reduce evaporation losses   without affecting performance

• Excellent electrical resistivity(a billion times higher than   DI-water)

• No significant change in resistivity with use

• High transparency to Rf and Microwaves Power

• Low environmental load

• Low cost of ownership

• No resistivity monitoring necessary

• No risk of short circuiting even if leak occurs on to   electronic components

• High MTBF (Mean Time Between Failure)

• Better process control

• Excellent thermal and chemical stability

• Good compatibility with materials

• No corrosion or reaction with construction materials

• No formation of decomposition residues

• No circulating pump seizure due to fluid degradation or   corrosion

• No flash or fire points

• No Auto Ignition Point

• No Explosion hazards

• Enhanced safety

• Safe to use at high temperature

Industry

Applications

Key Features

Semiconductors Front - End

Heat Transfer media for: Steppers, Dry - Etchers, CVD, PVD   and Ion Implanters

Excellent Dielectric Properties, Thermal Stability, Safety   and Low Cost of Ownership

Semiconductors Back - End

Heat Transfer media for: Probers

Excellent Dielectric Properties, Excellent Heat Transfer   Efficiency, Safety

Electronic

Heat Transfer media for: Testing Equipments.

Excellent Dielectric Properties, Safety, Environmental Safety