Trichlorosilane

135.45200

135.45

233-042-5

QZY2645L6V

0591

1295

DTXSID4029301

Colorless liquid

0

1.42000

1.3830 g/cm³ @ Temp: 0 °C

-126.5 °C

31.8 °C

-27ºC

1.4-1.402

Decomposes in water

Refrigerator

9.75 psi ( 20 °C)

1 (vs air)

1.2%-90.5% IN AIR

vol% in air: 1.20.5

ACRID ODOR

Dipole moment: 0.97|Trichlorosilane is ordinarily a source for silicon deposition at > 1150 °C.|Organosilanes containing one or more Si--H bonds have excellent reducing capabilities. /Organosilanes/|The polarity of the Si--H bond is opposite to that of the C--H bond. This difference in polarity imparts hydride character to the Si--H bonds of organosilanes. This difference in electronegativities is not as great as in ionic hydrides, and the Si--H bond is still largely (98%) covalent. /Organosilanes/|For more Other Experimental Properties (Complete) data for TRICHLOROSILANE (7 total), please visit the HSDB record page.

Highly flammable. Ignites spontaneously in air [NFPA, 1991]. Reacts violently with water, steam, moisture in air to generate heat and flammable (H2) and corrosive (HCl) gases. [Handling Chemicals Safely 1980. p. 924]. Based on a scenario where the chemical is spilled into an excess of water (at least 5 fold excess of water), half of the maximum theoretical yield of Hydrogen Chloride gas will be created in 0.03 minutes. Experimental details are in the following: "Development of the Table of Initial Isolation and Protective Distances for the 2008 Emergency Response Guidebook", ANL/DIS-09-2, D.F. Brown, H.M. Hartmann, W.A. Freeman, and W.D. Haney, Argonne National Laboratory, Argonne, Illinois, June 2009.

Chlorosilanes

Highly Flammable

TRICHLOROSILANE reacts with alcohols, acetone, light metals with generation of heat and combustible (H2) and corrosive (HCl) gases [Handling Chemicals Safely 1980. p. 924].

220 °F (USCG, 1999)|360 °F (182 °C)|185 °C

Lower flammable limit: 1.2% by volume; Upper flammable limit: 90.5% by volume|1.2%-90.5% IN AIR

The vapour is heavier than air and may travel along the ground; distant ignition possible.

Corrodes metal after reacting with moisture to form hydrochloric acid

85 BTU/lb= 47 Cal/g= 2.0X10+5 J/kg

I

4.3

UN 1295 4.3/PG 1

1

R12; R14; R17; R20/22; R29; R35

S16-S26-S36/37/39-S43-S45-S7/9

VV5950000

F+; C

Fireproof. Separated from food and feedstuffs and incompatible materials. See Chemical Dangers. Cool. Dry. Well closed. Ventilation along the floor.

Stable, but extremely flammable. Pyrophoric - spontaneously ignites in air. Explosion hazard in air - note wide explosion limits. Reacts violently with water. Incompatible with moisture, acids, bases, strong oxidizing agents, alcohols, amines.

P210-P280-P303 + P361 + P353-P305 + P351 + P338-P370 + P378-P422

H224-H250-H302 + H332-H314

SRP: The most favorable course of action is to use an alternative chemical product with less inherent propensity for occupational exposure or environmental contamination. Recycle any unused portion of the material for its approved use or return it to the manufacturer or supplier. Ultimate disposal of the chemical must consider: the material's impact on air quality; potential migration in soil or water; effects on animal, aquatic, and plant life; and conformance with environmental and public health regulations.

... Water reactive. Hydrochloric acid is released ... Reacts violently with water and aqueous soln, alcohols, organic acids, peroxides, amines, and oxidizing materials ...|... They will react with water or steam to produce heat, toxic & corrosive fumes of hydrogen chloride. /Chlorosilanes/|Can react vigorously with oixidizing materials.|Use of a single portion of trichlorosilane added to acetonitrile at 10 °C reduce diphenyl sulfoxide led to a violent explosion. The reaction previously had been effected uneventfully in a wide range of other solvents. The explosion was attributed to use of acetonitrile as solvent and/or the addition of the trichlorosilane as a single portion.|For more Hazardous Reactivities and Incompatibilities (Complete) data for TRICHLOROSILANE (6 total), please visit the HSDB record page.

ITC/USEPA; Information Review #223 (Draft) Chlorosilanes (1981)

Special Hazards of Combustion Products: Toxic hydrogen chloride and phosgene gases may form in fires. Behavior in Fire: Difficult to extinguish; re-ignition may occur. Vapor is heavier than air and may travel a considerable distance to a source of ignition and flash back. (USCG, 1999)|Extremely flammable. Gives off irritating or toxic fumes (or gases) in a fire. Vapour/air mixtures are explosive.|Corrosives, Flammable - 4th degree, Reactive - 2nd degree

|Danger|H224: Extremely flammable liquid and vapor [Danger Flammable liquids]|P210, P222, P233, P240, P241, P242, P243, P260, P261, P264, P270, P271, P280, P301+P312, P301+P330+P331, P302+P334, P303+P361+P353, P304+P312, P304+P340, P305+P351+P338, P310, P312, P321, P330, P363, P370+P378, P403+P235, P405, P422, and P501|H224 (100%): Extremely flammable liquid and vapor [Danger Flammable liquids]|Aggregated GHS information provided by 720 companies from 10 notifications to the ECHA C&L Inventory. Each notification may be associated with multiple companies.|P210, P223, P231+P232, P233, P240, P241, P242, P243, P260, P264, P270, P271, P280, P284, P301+P312, P301+P330+P331, P303+P361+P353, P304+P340, P305+P351+P338, P309+P311, P310, P320, P321, P330, P335+P334, P363, P370+P378, P402+P404, P403+P233, P403+P235, P405, and P501

Excerpt from ERG Guide 139 [Substances - Water-Reactive (Emitting Flammable and Toxic Gases)]: As an immediate precautionary measure, isolate spill or leak area in all directions for at least 50 meters (150 feet) for liquids and at least 25 meters (75 feet) for solids. SPILL: See ERG Table 1 - Initial Isolation and Protective Action Distances on the UN/NA 1295 datasheet. FIRE: If tank, rail car or tank truck is involved in a fire, ISOLATE for 800 meters (1/2 mile) in all directions; also, consider initial evacuation for 800 meters (1/2 mile) in all directions. (ERG, 2016)

Excerpt from ERG Guide 139 [Substances - Water-Reactive (Emitting Flammable and Toxic Gases)]: Fully encapsulating, vapor-protective clothing should be worn for spills and leaks with no fire. ELIMINATE all ignition sources (no smoking, flares, sparks or flames in immediate area). Do not touch or walk through spilled material. Stop leak if you can do it without risk. DO NOT GET WATER on spilled substance or inside containers. Use water spray to reduce vapors or divert vapor cloud drift. Avoid allowing water runoff to contact spilled material. FOR CHLOROSILANES, use AFFF alcohol-resistant medium-expansion foam to reduce vapors. SMALL SPILL: Cover with DRY earth, DRY sand or other non-combustible material followed with plastic sheet to minimize spreading or contact with rain. Dike for later disposal; do not apply water unless directed to do so. POWDER SPILL: Cover powder spill with plastic sheet or tarp to minimize spreading and keep powder dry. DO NOT CLEAN-UP OR DISPOSE OF, EXCEPT UNDER SUPERVISION OF A SPECIALIST. (ERG, 2016)

Acid-vapor-type respiratory protection; rubber gloves; chemical worker's goggles; other protective equipment as necessary to protect skin and eyes. (USCG, 1999)|... Positive pressure self-contained breathing apparatus.|Acid-vapor-type respiratory protection; rubber gloves; chemical worker's goggles; other protective equipment as necessary to protect skin and eyes.

A very dangerous fire hazard when exposed to heat, flame, or by chemical reaction.|... Trichlorosilane is highly flammable /Trichlorosilane/|The pure material is not impact-ignitable in absence of electrostatic charges, but technical material (possibly containing dichlorosilane) is.|Flammable liquid ... Low ignition energy ...

Containers may explode in fire. Vapor may explode if ignited in an enclosed area.|Vapor/air mixtures are explosive.|Explosive limits , vol% in air: 1.2-90.5

If material on fire or involved in fire: Do not extinguish fire unless flow can be stopped. Use "alcohol" foam, dry chemical or carbon dioxide. Cool all affected containers with flooding quantities of water. Apply water from as far a distance as possible. Do not use water on material itself. If large quantities of combustibles are involved, use water in flooding quantities as spray and fog. Use water spray to knock-down vapors.|Do not use halocarbons. Dry powders and carbon dioxide may be ineffective. Approach fire from upwind to avoid hazardous vapors and toxic decomposition products. Material is reactive with water but can be extinguished with a 6% solution in water of medium expansion foam. Use water spray to keep fire exposed containers cool. For small fires use copious quantities of water as spray to react with chlorosilane.|Evacuation: If fire becomes uncontrollable or container is exposed to direct flame - consider evacuation of one-third (1/3) mile radius.|No water. Aqueous film forming foams (AFFF), powder, carbon dioxide ... Cool drums, etc, by spraying with water but avoid contact of the substance with water.

... Corrosive ... May accumulate static electricity. Water reactive ... Hydrochloric acid is released.|Difficult to extinguish; reignition may occur. Flashback along vapor trail may occur.|The vapor is heavier than air and may travel along the ground; distant ignition possible.|Reacts violently with fire extinguishing agents such as water.

Evacuate danger area! Consult an expert! Ventilation. Collect leaking and spilled liquid in sealable containers as far as possible; do not use plastic containers. Absorb remaining liquid in dry sand or inert absorbent and remove to safe place. Do NOT wash away into sewer. (Extra personal protection: chemical protection suit including self-contained breathing apparatus.)|Eliminate all ignition sources. Approach release from upwind. Keep water away from release. Stop or control the leak, if this can be done without undue risk. Prompt cleanup and removal are necessary. May ignite spontaneously in insulating materials (absorbent materials) depending on size of piles. Control runoff and isolate discharged material for proper disposal.

SRP: Local exhaust ventilation should be applied wherever there is an incidence of point source emissions or dispersion of regulated contaminants in the work area. Ventilation control of the contaminant as close to its point of generation is both the most economical and safest method to minimize personnel exposure to airborne contaminants.|Caution: silanes are toxic. Avoid contact with skin and eyes. Use effective fume removal device. /Silanes/|SRP: The scientific literature for the use of contact lenses in industry is conflicting. The benefit or detrimental effects of wearing contact lenses depend not only upon the substance, but also on factors including the form of the substance, characteristics and duration of the exposure, the uses of other eye protection equipment, and the hygiene of the lenses. However, there may be individual substances whose irritating or corrosive properties are such that the wearing of contact lenses would be harmful to the eye. In those specific cases, contact lenses should not be worn. In any event, the usual eye protection equipment should be worn even when contact lenses are in place.|Evacuation: ... If material leaking (not on fire) consider evacuation from downwind area based on amount of material spilled, location and weather conditions.|For more Preventive Measures (Complete) data for TRICHLOROSILANE (7 total), please visit the HSDB record page.

If ... THERE IS NO FIRE, go directly to the Table of Initial Isolation and Protective Action Distances /(see table below)/ ... to obtain initial isolation and protective action distances. IF THERE IS A FIRE, or IF A FIRE IS INVOLVED, go directly to the appropriate guide /(see guide(s) below)/ and use the evacuation information shown under PUBLIC SAFETY.|Table of Water-Reactive Materials Which Produce Toxic Gases. Trichlorosilane|/GUIDE 139: SUBSTANCES - WATER-REACTIVE (Emitting Flammable and Toxic Gases)/ Fire or Explosion: Produce flammable and toxic gases on contact with water. May ignite on contact with water or moist air. Some react vigorously or explosively on contact with water. May be ignited by heat, sparks or flames. May re-ignite after fire is extinguished. Some are transported in highly flammable liquids. Containers may explode when heated. Runoff may create fire or explosion hazard.|/GUIDE 139: SUBSTANCES - WATER-REACTIVE (Emitting Flammable and Toxic Gases)/ Health: Highly toxic: contact with water produces toxic gas, may be fatal if inhaled. Inhalation or contact with vapors, substance or decomposition products may cause severe injury or death. May produce corrosive solutions on contact with water. Fire will produce irritating, corrosive and/or toxic gases. Runoff from fire control may cause pollution.|For more DOT Emergency Guidelines (Complete) data for TRICHLOROSILANE (10 total), please visit the HSDB record page.

No person may /transport,/ offer or accept a hazardous material for transportation in commerce unless that person is registered in conformance ... and the hazardous material is properly classed, described, packaged, marked, labeled, and in condition for shipment as required or authorized by ... /the hazardous materials regulations (49 CFR 171-177)./|The International Air Transport Association (IATA) Dangerous Goods Regulations are published by the IATA Dangerous Goods Board pursuant to IATA Resolutions 618 and 619 and constitute a manual of industry carrier regulations to be followed by all IATA Member airlines when transporting hazardous materials. Trichlorosilane is included on the dangerous goods list.|The International Maritime Dangerous Goods Code lays down basic principles for transporting hazardous chemicals. Detailed recommendations for individual substances and a number of recommendations for good practice are included in the classes dealing with such substances. A general index of technical names has also been compiled. This index should always be consulted when attempting to locate the appropriate procedures to be used when shipping any substance or article. Trichlorosilane is included on the dangerous goods list.

Inhalation causes severe irritation of respiratory system.|Irritating to the skin, eyes and mucous membrane. /Chlorosilanes/|Corrosive. Causes severe eye and skin burns. Serious health hazard. May be harmful if absorbed through skin or inhaled ...

Evacuate danger area! Consult an expert! Personal protection: chemical protection suit including self-contained breathing apparatus. Ventilation. Do NOT wash away into sewer. Collect leaking and spilled liquid in sealable non-plastic containers as far as possible. Absorb remaining liquid in dry sand or inert absorbent. Then store and dispose of according to local regulations.

Fireproof. Separated from food and feedstuffs and incompatible materials. See Chemical Dangers. Cool. Dry. Well closed. Ventilation along the floor.

No indication can be given about the rate at which a harmful concentration of this substance in the air is reached on evaporation at 20 °C.

The substance is corrosive to the eyes, skin and respiratory tract. Corrosive on ingestion. Inhalation of the vapour may cause lung oedema. Inhalation may cause asthma-like reactions. Exposure could cause death. Medical observation is indicated.

NO open flames, NO sparks and NO smoking. Closed system, ventilation, explosion-proof electrical equipment and lighting. Do NOT use compressed air for filling, discharging, or handling.

STRICT HYGIENE! IN ALL CASES CONSULT A DOCTOR!

Use ventilation, local exhaust or breathing protection.

Protective gloves. Protective clothing.

Wear face shield or eye protection in combination with breathing protection.

| 3 - Materials that, under emergency conditions, can cause serious or permanent injury.| 4 - Materials that rapidly or completely vaporize at atmospheric pressure and normal ambient temperature or that are readily dispersed in air and burn readily.| 2 - Materials that readily undergo violent chemical changes at elevated temperatures and pressures.|W - No water: Materials that react violently or explosively with water.

LD50 Rat oral 1.03 g/kg|LC50 Rat inhalation 2767 ppm/1 hr|LD50 Mouse 1500 mg/cu m/2 hr|LC50 Mouse inhalation 1.5 mg/L/2 hr

Trichlorosilane's production and use as an intermediate in silicone synthesis(1) may result in its release to the environment through various waste streams(SRC).

TERRESTRIAL FATE: All silicon chlorides are immediately and completely hydrolyzed by water(1); trichlorosilane has been reported to hydrolyze in water releasing hydrochloric acid(2). Due to the hydrolysis of trichlorosilane, adsorption to soil is not expected to be important fate process(SRC). Trichlorosilane is expected to volatilize from dry soil surfaces(SRC) based upon a vapor pressure of 594 mm Hg(3).|AQUATIC FATE: All silicon chlorides are immediately and completely hydrolyzed by water(1) and trichlorosilane has been reported to hydrolyze in water releasing hydrochloric acid(2). Due to the hydrolysis of trichlorosilane, volatilization, biodegradation and bioaccumulation are not expected to be important fate process(SRC).|ATMOSPHERIC FATE: According to a model of gas/particle partitioning of semivolatile organic compounds in the atmosphere(1), trichlorosilane, which has a vapor pressure of 594 mm Hg at 25 °C(2), is expected to exist solely as a vapor in the ambient atmosphere.|ATMOSPHERIC FATE: In the trophosphere, the ultimate fate of chlorosilane is probably determined by hydrolysis of the silicon-chlorine bonds in water droplets. /Chlorosilanes/|ATMOSPHERIC FATE: In arid regions, some transport of chlorosilanes to the stratosphere might occur. In the stratosphere, photolysis by short wavelength light is expected. /Chlorosilanes/

The rate constant for the vapor-phase reaction of trichlorosilane with photochemically-produced hydroxyl radicals has been estimated as 1.5X10-13 cu cm/molecule-sec at 25 °C(SRC) using a structure estimation method(1). This corresponds to an atmospheric half-life of about 36 days at an atmospheric concentration of 5X10+5 hydroxyl radicals per cu cm(1). All silicon chlorides are immediately and completely hydrolyzed by water(2) and trichlorosilane has been reported to hydrolyze in water releasing hydrochloric acid(3). Methyl silanes are transparent to UV radiation >290 nm(4) and therefore methyltrichlorosilane is not expected to undergo direct photolytic degradation(SRC).

Trichlorosilane has been reported to hydrolyze immediately upon contact with water(1) and therefore bioconcentration of trichlorosilane is not expected(SRC).

All silicon chlorides are immediately and completely hydrolyzed by water(1). Trichlorosilane has been reported to hydrolyze in water releasing HCl(2); therefore, adsorption to soil is not expected to be an important fate process(SRC).

All silicon chlorides are immediately and completely hydrolyzed by water(1) and trichlorosilane has been reported to hydrolyze in water, releasing hydrochloric acid(2). Trichlorosilane is expected to volatilize from dry soil surfaces(SRC) based upon a vapor pressure of 594 mm Hg(3).|The high volatility of /chlorosilanes/ suggests that they will move freely into the atmosphere. /Chlorosilanes/

NIOSH (NOES Survey 1981-1983) has statistically estimated that 2,201 workers (267 of these are female) are potentially exposed to trichlorosilane in the US(1). Occupational exposure to trichlorosilane may occur through inhalation and dermal contact with this compound at workplaces where trichlorosilane is produced or used(SRC).

The substance can be absorbed into the body by inhalation of its vapor and by ingestion.

... Chlorosilanes will be rapidly hydrolyzed upon contact with tissue fluids to release hydrochloric acid. /Chlorosilanes/

Inhalation causes severe irritation of respiratory system. Liquid causes severe burns of eyes and skin. Ingestion causes severe burns of mouth and stomach. (USCG, 1999)

INHALATION: remove victim from exposure; if breathing is difficult or stopped, give artificial respiration; call physician. EYES or SKIN: flush with plenty of water immediately for at least 15 min. and get medical attention. INGESTION: do NOT induce vomiting; give large amount of water; get medical attention. (USCG, 1999)

Fresh air, rest. Half-upright position. Artificial respiration may be needed. Refer for medical attention.

Remove contaminated clothes. Rinse skin with plenty of water or shower. Refer for medical attention .

First rinse with plenty of water for several minutes (remove contact lenses if easily possible), then refer for medical attention.

No specific antidote is available /for chlorosilanes/, but first aid treatment consists of copious irrigation with water, & subsequent treatment is as for chemical burns in general. /Chlorosilanes/|Basic treatment: Establish a patent airway (oropharyngeal or nasopharyngeal airway, if needed). Suction if necessary. Watch for signs of respiratory insufficiency and assist ventilations if necessary. Administer oxygen by nonrebreather mask at 10 to 15 L/min. Monitor for pulmonary edema and treat if necessary ... Anticipate seizures and treat if necessary ... Monitor for shock and treat if necessary ... For eye contamination, flush eyes immediately with water. Irrigate each eye continuously with 0.9% saline (NS) during transport ... Do not use emetics. For ingestion, rinse mouth and administer 5 ml/kg up to 200 ml of water for dilution if the patient can swallow, has a strong gag reflex, and does not drool. Administer activated charcoal (refer to ingestion protocol in Section Three ... Cover skin burns with sterile dressings after decontamination ... /Silane, Chlorosilane, and Related Compounds/|Advanced treatment: Consider orotracheal or nasotracheal intubation for airway control in the patient who is unconscious, has severe pulmonary edema, or is in severe respiratory distress. Early intubation at the first sign of upper airway obstruction may be necessary. Positive-pressure ventilation techniques with a bag-valve-mask device may be beneficial. Consider drug therapy for pulmonary edema ... Monitor cardiac rhythm and treat arrhythmias if necessary ... Start IV administration of D5W /SRP: "To keep open", minimal flow rate/. Use 0.9% saline (NS) or lactated Ringer's (LR) if signs of hypovolemia are present. For hypotension with signs of hypovolemia, administer fluid cautiously. Consider vasopressors if patient is hypotensive with a normal fluid volume. Watch for signs of fluid overload ... Treat seizures with diazepam or lorazepam ... Use proparacaine hydrochloride to assist eye irrigation ... /Silane, Chlorosilane, and related compounds/|FIRST AID: Inhalation--Fresh air, rest. Half-upright position. Artificial respiration may be needed. Refer for medical attention ... The symptoms of lung oedema often do not become manifest until a few hours have passed and they are aggravated by physical effort. Rest and medical observation are therefore essential. Immediate administration of an appropriate inhalation therapy by a doctor or a person authorized by him/her, should be considered ... Skin--Remove contaminated clothes. Rinse skin with plenty of water or shower. Refer for medical attention; Eyes--First rinse with plenty of water for several minutes (remove contact lenses if easily possible), then take to a doctor; Ingestion--Rinse mouth. Do NOT induce vomiting. Give nothing to drink. Refer for medical attention.

/SIGNS AND SYMPTOMS/ Inhalation causes severe irritation of respiratory system. Liquid causes severe burns of eyes and skin. Ingestion causes severe burns of mouth and stomach.|/SIGNS AND SYMPTOMS/ ... /Trichlorosilane/ is a lachrymator ...|/SIGNS AND SYMPTOMS/ ... Trichlorosilane/ is corrosive to the eyes, the skin and the respiratory tract. Corrosive on ingestion. Inhalation of its vapor may cause lung edema ... Inhalation ... may cause asthma-like reactions. Exposure may result in death ... The symptoms of lung edema often do not become manifest until a few hours have passed and they are aggravated by physical effort ...|/SIGNS AND SYMPTOMS/ ACUTE ... SYMPTOMS: Inhalation--Cough. Sore throat. Burning sensation. Labored breathing. Shortness of breath. Symptoms may be delayed ... Skin--Redness. Pain. Blisters. Skin burns; Eyes--Redness. Pain. Severe deep burns; Ingestion--Burning sensation. Abdominal pain. Shock or collapse.

trichlorosilane

The substance can be absorbed into the body by inhalation of its vapour and by ingestion.

Cough. Sore throat. Burning sensation. Laboured breathing. Shortness of breath. Symptoms may be delayed.

Redness. Pain. Blisters. Skin burns.

Redness. Pain. Severe deep burns.

GRADES OF PURITY: 99+%.

All other basic inorganic chemical manufacturing|Silane, trichloro-: ACTIVE

DETERMINATION OF ATMOSPHERIC TRICHLOROSILANE PHOTOMETRICALLY @ 650 NM.

Fire Hazards -> Corrosives, Flammable - 4th degree, Reactive - 2nd degree