Nitrogen trifluoride

71.00190

71.00

232-007-1

4402F4X0RH

1234

2451

DTXSID4040181

Colorless gas [Note: Shipped as a nonliquified compressed gas]

28129011

3.24000

0.94190

Nitrogen trifluoride appears as a colorless gas with a moldy odor. Very toxic by inhalation. Slightly soluble in water. Corrosive to tissue. Under prolonged exposure to fire or heat the containers may rupture violently and rocket. Used to make other chemicals and as a component of rocket fuels.

1.92 g/cm³ @ Temp: -216.7 °C

-208.5 °C

-129 °C

1.187

insoluble

Nitrogen trifluoride cylinders must be securely supported while in use to prevent movement and straining of connections. Full cylinders must be stored in a well-ventilated area, protected from excessive heat (125°F or 51.7°C), located away from organic or flammable materials, and secured. Valve protection caps and valve outlet caps must be securely in place at all times when the cylinder is not in use.

>1 atm

2.902

Nonflammable Gas

Several hundred grams of a crude reactions mixture involving nitrogen trifluoride and tetrafluorohydrazine had been collected in a small stainless steel cylinder. During opening of valves to measure cylinder pressure, the cylinder exploded, killing one man and injuring another.

Moldy odor

Global Warming Potential (100 yr) = 17,200 /CO2 = 1/|Critical volume: 167 cu cm/mol|Reactivity: ... strong oxidzer; reacts explosively with reducing agents; decomposed by electric sparks. Conversion factors at 25 °C and 760 torr: 1 ppm = 2.90 g/cu m; 1 mg/cu m = 0.344 ppm|Heat of formation = -132.1 kJ/mol; Standard molar Gibbs energy of formation = -90.6 kJ/mol; Standard molar entropy = 260.8 kJ/mol; Molar heat capacity at constant pressure, 298.15 K = 53.5 J/mol|Solidifies at -206.8 °C

Slightly soluble in water.

Oxidizing Agents, Strong

Explosive

NITROGEN TRIFLUORIDE is a very powerful oxidizing agent. Presents dangerous fire hazard in the presence of reducing agents. Etches glass in the presence of moisture. Emits toxic and corrosive fumes of fluoride when heated to decomposition [Lewis, 3rd ed., 1993, p. 937]. Can react violently with hydrogen, ammonia, carbon monoxide, diborane, hydrogen sulfide, methane, tetrafluorohydrazine, charcoal. Explosive reaction with chlorine dioxide. A severe explosion may occur when exposed to reducing agents under pressure [Bretherick, 5th ed., 1995, p. 1427].

12.97 eV

Nonflammable Gas

The gas is heavier than air and may accumulate in lowered spaces causing a deficiency of oxygen.

Does not attack glass, mercury

11.56 kJ/mol at -128.75 °C

Critical temperature = 234 K; critical pressure = 4.46MPa

2.2

2451

R8

S17-S23-S38

QX1925000

O: Oxidizing agent;

Fireproof if in building. Separated from combustible substances and reducing agents. Cool.

P220, P244, P260, P261, P264, P270, P271, P304+P312, P304+P340, P309+P311, P312, P314, P370+P376, P403, P405, P410+P403, P501

H270

SRP: Recycle any unused portion of the material for its approved use or return it to the manufacturer or supplier. Ultimate disposal of the chemical must consider: the material's impact on air quality; potential migration in air, soil or water; effects on animal, aquatic and plant life; and conformance with environmental and public health regulations. If it is possible or reasonable use an alternative chemical product with less inherent propensity for occupational harm/injury/toxicity or environmental contamination.|Spillage Disposal: Ventilation. NEVER direct water jet on liquid. Personal protection: self-contained breathing apparatus.|SRP: At the time of review, criteria for land treatment or burial (sanitary landfill) disposal practices are subject to significant revision. Prior to implementing land disposal of waste residue (including waste sludge), consult with environmental regulatory agencies for guidance on acceptable disposal practices.

Can react violently with /ammonia/, /carbon monoxide/, diborane, /hydrogen/, /hydrogen sulfide/, /methane/, tetrafluorohydrazine. Can react vigorously with reducing materials.|Incompatible with charcoal, hydrogen-containing compounds, tetrafluorihydrazine.|NO contact with flammables. NO contact with reducing agents.|Attacks metals.|For more Hazardous Reactivities and Incompatibilities (Complete) data for NITROGEN TRIFLUORIDE (11 total), please visit the HSDB record page.

Excerpt from ERG Guide 122 [Gases - Oxidizing (Including Refrigerated Liquids)]: Substance does not burn but will support combustion. Some may react explosively with fuels. May ignite combustibles (wood, paper, oil, clothing, etc.). Vapors from liquefied gas are initially heavier than air and spread along ground. Runoff may create fire or explosion hazard. Containers may explode when heated. Ruptured cylinders may rocket. (ERG, 2016)|Not combustible but enhances combustion of other substances. Gives off irritating or toxic fumes (or gases) in a fire. Heating will cause rise in pressure with risk of bursting.

|Danger|H270 (100%): May cause or intensify fire; oxidizer [Danger Oxidizing gases]|P220, P244, P260, P261, P271, P304+P312, P304+P340, P312, P314, P370+P376, P403, P410+P403, and P501|Aggregated GHS information provided by 84 companies from 4 notifications to the ECHA C&L Inventory. Each notification may be associated with multiple companies.|H270: May cause or intensify fire; oxidizer [Danger Oxidizing gases]|P220, P244, P260, P261, P264, P270, P271, P304+P312, P304+P340, P309+P311, P312, P314, P370+P376, P403, P405, and P501

Excerpt from ERG Guide 122 [Gases - Oxidizing (Including Refrigerated Liquids)]: As an immediate precautionary measure, isolate spill or leak area for at least 100 meters (330 feet) in all directions. LARGE SPILL: Consider initial downwind evacuation for at least 500 meters (1/3 mile). FIRE: If tank, rail car or tank truck is involved in a fire, ISOLATE for 800 meters (1/2 mile) in all directions; also, consider initial evacuation for 800 meters (1/2 mile) in all directions. (ERG, 2016)

Excerpt from ERG Guide 122 [Gases - Oxidizing (Including Refrigerated Liquids)]: Keep combustibles (wood, paper, oil, etc.) away from spilled material. Do not touch or walk through spilled material. Stop leak if you can do it without risk. If possible, turn leaking containers so that gas escapes rather than liquid. Do not direct water at spill or source of leak. Use water spray to reduce vapors or divert vapor cloud drift. Avoid allowing water runoff to contact spilled material. Prevent entry into waterways, sewers, basements or confined areas. Allow substance to evaporate. Isolate area until gas has dispersed. CAUTION: When in contact with refrigerated/cryogenic liquids, many materials become brittle and are likely to break without warning. (ERG, 2016)

Skin: No recommendation is made specifying the need for personal protective equipment for the body. Eyes: No recommendation is made specifying the need for eye protection. Wash skin: No recommendation is made specifying the need for washing the substance from the skin (either immediately or at the end of the work shift). Remove: No recommendation is made specifying the need for removing clothing that becomes wet or contaminated. Change: No recommendation is made specifying the need for the worker to change clothing after the work shift. (NIOSH, 2016)|Respirator Recommendations: Up to 100 ppm: [Table#2841]|Respirator Recommendations: Up to 250 ppm: [Table#2842]|Respirator Recommendations: Up to 500 ppm: [Table#2843]|Respirator Recommendations: Up to 1000 ppm: [Table#2844]|For more Personal Protective Equipment (PPE) (Complete) data for NITROGEN TRIFLUORIDE (6 total), please visit the HSDB record page.|(See protection codes)

This material is a nonflammable gas.|A very dangerous fire hazard; a very powerful oxidizer; otherwise inert at normal temperatures and pressures. Reacts violently when ignited with /hydrogen/.|Not combustible but enhances combustion of other substances.

Severe explosion hazard by chemical reaction with reducing agents, particularly when under pressure.|Studies of nitrogen trifluoride and diborane revealed no interactions at room temperature and 1-8 atmospheres pressure. When the mixtures were handled as liquids at low temperatures, violent explosions occurred, even when precautions were made to eliminate /oxygen difluoride/ impurities.|Explosive reactions occur upon ignition of mixtures of nitrogen trifluoride with good reducing agents such as ammonia, carbon monoxide, hydrogen, hydrogen sulfide or methane.|Several hundred grams of a crude reactions mixture involving nitrogen trifluoride and tetrafluorohydrazine had been collected in a small stainless steel cylinder. During opening of valves to measure cylinder pressure, the cylinder exploded, killing one man and injuring another.

Do not extinguish the fire unless the flow of gas can be stopped and any remaining gas is out of the line. Specially trained personnel may use fog lines to cool exposures and let the fire burn itself out. Vapors are heavier than air and will collect in low areas. Containers may explode in fire. Storage containers and parts of containers may rocket great distances, in many directions. If material or contaminated runoff enters waterways, notify downstream users of potentially contaminates waters. Notify local health and fire officials and pollution control agencies. From a secure, explosion-proof location, use water spray to cool exposed containers. If cooling streams are ineffective (venting sound increases in volume and pitch, tank discolors, or shows any signs of deforming), withdraw immediately to a secure location. ... The only respirators recommended for firefighting are self-contained breathing apparatuses that have full face-pieces and are operated in a pressure-demand or other positive-pressure mode.|If material on fire or involved in fire: Solid streams of water may be ineffective. Extinguish fire using agent suitable for type of surrounding fire (Material itself does not burn or burns with difficulty.) Cool all affected containers with flooding quantities of water. Apply water from as far a distance as possible.|Turn leaking cylinder with the leak up to prevent escape of gas in liquid state.

Heating will cause rise in pressure with risk of bursting.|Poisonous gases, including fluorine, are produced in fire.

If in a building, evacuate building and confine vapors by closing doors and shutting down HVAC systems. Restrict persons not wearing protective equipment from area of spill or leak until cleanup is complete. Remove all ignition sources. Ventilate area of spill or leak to disperse the gas. Wear chemical protective suit with self-contained breathing apparatus to combat spills. Stay upwind and use water spray to "knock down" vapor; contain runoff. Stop the flow of gas, if it can be done safely from a distance. If source is a cylinder and the leak cannot be stopped in place, remove the leaking cylinder to a safe place, and repair leak or allow cylinder to empty. Keep this chemical out of confined spaces, such as a sewer, because of the possibility of explosion, unless the sewer is designed to prevent the buildup of explosive concentrations.|Persons not wearing protective equipment and clothing should be restricted from areas of leaks until cleanup has been completed. ... 1. Ventilate area of leak to disperse gas. 2. Stop flow of gas. If source of leak is a cylinder and the leak cannot be stopped in place, remove the leaking cylinder to a safe place in the open air, and repair the leak or allow the cylinder to empty.|Gas leakage: Pass through a reducing agent (sodium bisulfite) and sodium bicarbonate solution with a trap in the line, when the valve can not be closed.

SRP: The scientific literature for the use of contact lenses by industrial workers is inconsistent. The benefits or detrimental effects of wearing contact lenses depend not only upon the substance, but also on factors including the form of the substance, characteristics and duration of the exposure, the uses of other eye protection equipment, and the hygiene of the lenses. However, there may be individual substances whose irritating or corrosive properties are such that the wearing of contact lenses would be harmful to the eye. In those specific cases, contact lenses should not be worn. In any event, the usual eye protection equipment should be worn even when contact lenses are in place.|If material not on fire and not involved in fire: Keep material out of water sources and sewers. Attempt to stop leak if without undue personnel hazard.|Personnel protection: Avoid breathing vapors. Keep upwind. ... Do not handle broken packages unless wearing appropriate personal protective equipment.

/GUIDE 122 GASES - OXIDIZING (Including Refrigerated Liquids)/ Fire or Explosion: Substance does not burn but will support combustion. Some may react explosively with fuels. May ignite combustibles (wood, paper, oil, clothing, etc.). Vapors from liquefied gas are initially heavier than air and spread along ground. Runoff may create fire or explosion hazard. Containers may explode when heated. Ruptured cylinders may rocket.|/GUIDE 122 GASES - OXIDIZING (Including Refrigerated Liquids)/ Health: Vapors may cause dizziness or asphyxiation without warning. Contact with gas or liquefied gas may cause burns, severe injury and/or frostbite. Fire may produce irritating and/or toxic gases.|/GUIDE 122 GASES - OXIDIZING (Including Refrigerated Liquids)/ Public Safety: CALL Emergency Response Telephone Number on Shipping Paper first. If Shipping Paper not available or no answer, refer to appropriate telephone number listed on the inside back cover. As an immediate precautionary measure, isolate spill or leak area for at least 100 meters (330 feet) in all directions. Keep unauthorized personnel away. Stay upwind. Many gases are heavier than air and will spread along ground and collect in low or confined areas (sewers, basements, tanks). Keep out of low areas. Ventilate closed spaces before entering.|/GUIDE 122 GASES - OXIDIZING (Including Refrigerated Liquids)/ Protective Clothing: Wear positive pressure self-contained breathing apparatus (SCBA). Wear chemical protective clothing that is specifically recommended by the manufacturer. It may provide little or no thermal protection. Structural firefighters' protective clothing provides limited protection in fire situations ONLY; it is not effective in spill situations where direct contact with the substance is possible. Always wear thermal protective clothing when handling refrigerated/cryogenic liquids.|For more DOT Emergency Guidelines (Complete) data for NITROGEN TRIFLUORIDE (8 total), please visit the HSDB record page.

No person may /transport,/ offer or accept a hazardous material for transportation in commerce unless that person is registered in conformance ... and the hazardous material is properly classed, described, packaged, marked, labeled, and in condition for shipment as required or authorized by ... /the hazardous materials regulations (49 CFR 171-177)./|The International Air Transport Association (IATA) Dangerous Goods Regulations are published by the IATA Dangerous Goods Board pursuant to IATA Resolutions 618 and 619 and constitute a manual of industry carrier regulations to be followed by all IATA Member airlines when transporting hazardous materials. Nitrogen trifluoride is included on the dangerous goods list.|The International Maritime Dangerous Goods Code lays down basic principles for transporting hazardous chemicals. Detailed recommendations for individual substances and a number of recommendations for good practice are included in the classes dealing with such substances. A general index of technical names has also been compiled. This index should always be consulted when attempting to locate the appropriate procedures to be used when shipping any substance or article. Nitrogen trifluoride is included on the dangerous goods list.

Some eye irritation was noted in /rats, mice, monkeys, and dogs/ during exposure.

Permissible Exposure Limit: Table Z-1 8-hr Time Weighted Avg: 10 ppm (29 mg/cu m).

Recommended Exposure Limit: 10 Hour Time-Weighted Average: 10 ppm (29 mg/cu m).

Ventilation. NEVER direct water jet on liquid. Personal protection: self-contained breathing apparatus.

Fireproof if in building. Separated from combustible substances and reducing agents. Cool.

A harmful concentration of this gas in the air will be reached very quickly on loss of containment.

The substance may have effects on the liver and kidneys. Repeated or prolonged inhalation may cause fluorosis.

NO contact with flammables. NO contact with reducing agents.

Use ventilation, local exhaust or breathing protection.

Wear safety goggles.

IDENTIFICATION AND USE: Nitrogen trifluoride is a colorless gas with a moldy odor. It is used as a chamber-cleaning gas in the manufacture of electronics. Nitrogen trifluoride is preferred to F2 in high-power chemical lasers because of its ease of handling at ambient temperatures. It is also an oxidizer for high-energy fuels, chemical synthesis. HUMAN EXPOSURE AND TOXICITY: Nitrogen trifluoride is a simple asphyxiant. Five volunteers were exposed to nitrogen trifluoride at concentrations of 100 and 500 ppm for 2 to 3 minutes. No odor was detected at 100 ppm, but one of the five reported the odor detectable at 500 ppm. ANIMAL STUDIES: Nitrogen trifluoride has a moderate acute inhalation toxicity causing anoxic deaths due to methemoglobinemia. Acute inhalation also results in slight histologic changes in the liver and kidneys of some rats and enlargement and darkening of the spleen. Serum glutamic-oxaloacetic transaminase levels in the rats were essentially unaffected after acute inhalation. Dogs surviving exposure at 9600 ppm for 60 minutes exhibited Heinz body-included hemolysis, anemia, decreased hematocrit, decreased hemoglobin, reduced red blood cell count, and clinical signs consistent with histotoxic anoxia as a result of methemoglobin formation. Rabbits that received 9 intraperitoneal injections of 10 mL of nitrogen trifluoride gas in 29 days showed enlarged spleens, pathologic changes in the liver, and myocardial degeneration.

LC50 Mouse inhalation 7500 ppm/1 hr|LC50 Rat inhalation 6700 ppm/1 hr|LC50 Mouse inhalation 2000 pm/4 hr|LC50 Dog inhalation 9600 ppm/1 hr|LC50 Monkey inhalation 7500 ppm/1hr

Persons with blood disorders may be at increased risk from exposure.

Nitrogen trifluoride does not occur naturally in the environment(1).

Nitrogen trifluouride's production and use in high energy fuels and as a chemical intermediate(1) may result in its release to the environment through various waste streams(SRC).|Unlike many other greenhouse gases, fluorinated gases /such as nitrogen trifluoride/ have no natural sources and only come from human-related activities. They are emitted through a variety of industrial processes such as aluminum and semiconductor manufacturing. ... Like other long-lived greenhouse gases, fluorinated gases are well-mixed in the atmosphere, spreading around the world after they're emitted. Fluorinated gases are removed from the atmosphere only when they are destroyed by sunlight in the far upper atmosphere. In general, fluorinated gases are the most potent and longest lasting type of greenhouse gases emitted by human activities(1).

Atmospheric Lifetime = 740 years

According to the 2012 TSCA Inventory Update Reporting data, 3 reporting facilities estimate the number of persons reasonably likely to be exposed during the manufacturing, processing, or use of nitrogen trifluoride in the United States may be as low as <10 workers per plant; the data may be greatly underestimated due to confidential business information (CBI) or unknown values(1).|NIOSH (NOES Survey 1981-1983) has statistically estimated that 1,096 workers (140 of these are female) were potentially exposed to nitrogen trifluoride in the US(1). Occupational exposure to nitrogen trifluoride may occur through inhalation and dermal contact with this compound at workplaces where nitrogen trifluoride is produced or used. (SRC)

Fluorides as HF, CO2, CO, CF4, N2, O2 + Ar, SF6, N2O, and H2O. /From table/

Excerpt from ERG Guide 122 [Gases - Oxidizing (Including Refrigerated Liquids)]: Vapors may cause dizziness or asphyxiation without warning. Contact with gas or liquefied gas may cause burns, severe injury and/or frostbite. Fire may produce irritating and/or toxic gases. (ERG, 2016)

Breathing: If a person breathes large amounts of this chemical, move the exposed person to fresh air at once. If breathing has stopped, perform mouth-to-mouth resuscitation. Keep the affected person warm and at rest. Get medical attention as soon as possible. (NIOSH, 2016)|(See procedures)

Fresh air, rest.

Remove contaminated clothes.

First rinse with plenty of water for several minutes (remove contact lenses if easily possible), then refer for medical attention.

Immediate first aid: Ensure that adequate decontamination has been carried out. If patient is not breathing, start artificial respiration, preferably with a demand-valve resuscitator, bag-valve-mask device, or pocket mask, as trained. Perform CPR if necessary. Immediately flush contaminated eyes with gently flowing water. Do not induce vomiting. If vomiting occurs, lean patient forward or place on left side (head-down position, if possible) to maintain an open airway and prevent aspiration. Keep patient quiet and maintain normal body temperature. Obtain medical attention. /Fluorine and Related Compounds/|Basic treatment: Establish a patent airway (oropharyngeal or nasopharyngeal airway, if needed). Suction if necessary. Watch for signs of respiratory insufficiency and assist ventilations if necessary. Administer oxygen by nonrebreather mask at 10 to 15 L/min. Monitor for pulmonary edema and treat if necessary ... . Monitor for shock and treat if necessary ... . Anticipate seizures and treat if necessary ... . For eye contamination, flush eyes immediately with water. Irrigate each eye continuously with 0.9% saline (NS) during transport ... . Do not use emetics. For ingestion, rinse mouth and administer 5 mL/kg up to 200 mL of water for dilution if the patient can swallow, has a strong gag reflex, and does not drool ... . Cover skin burns with dry sterile dressings after decontamination ... . /Fluorine and Related Compounds/|Advanced treatment: Consider orotracheal or nasotracheal intubation for airway control in the patient who is unconscious, has severe pulmonary edema, or is in severe respiratory distress. Positive-pressure ventilation techniques with a bag-valve-mask device may be beneficial. Consider drug therapy for pulmonary edema ... . Monitor cardiac rhythm and treat arrhythmias if necessary ... . Start IV administration of D5W. Use 0.9% saline (NS) or lactated Ringer's (LR) if signs of hypovolemia are present. For hypotension with signs of hypovolemia, administer fluid cautiously. Consider vasopressors if patient is hypotensive with a normal fluid volume. Watch for signs of fluid overload ... . Treat seizures with diazepam (Valium) or lorazepam (Ativan) ... . Use proparacaine hydrochloride to assist eye irrigation ... .|First Aid: If this chemical gets into the eyes, remove any contact lenses at once and irrigate immediately for at least 15 min, occasionally lifting upper and lower lids. Seek medical attention immediately. If this chemical contacts the skin, remove contaminated clothing and wash immediately with soap and water. Seek medical attention immediately. If this chemical has been inhaled, remove from exposure, begin rescue breathing (using universal precautions, including resuscitation mask) if breathing has stopped and CPR if heart action has stopped. Transfer promptly to a medical facility. When this chemical has been swallowed, get medical attention. Give large quantities of water and induce vomiting. Do not make an unconscious person vomit. If frostbite has occurred, seek medical attention immediately; do NOT rub the affected areas or flush them with water. In order to prevent further tissue damage, do NOT attempt to remove frozen clothing from frostbitten areas. If frostbite has NOT occurred, immediately and thoroughly wash contaminated skin with soap and water.|For more Antidote and Emergency Treatment (Complete) data for NITROGEN TRIFLUORIDE (7 total), please visit the HSDB record page.

NF(3) gas

The substance can be absorbed into the body by inhalation.|inhalation

In Animals: anoxia, cyanosis; methemoglobinemia; lassitude (weakness, exhaustion), dizziness, headache; liver, kidney injury

Blood, liver, kidneys

Etchant grade (99.5%), technical (98.0%) grade|Commercial, VLSI, and Megaclass. /From table/

Computer and electronic product manufacturing|Nitrogen fluoride (NF3): ACTIVE

We present an analytical method for the in situ measurement of atmospheric nitrogen trifluoride (NF(3)), an anthropogenic gas with a 100-year global warming potential of over 16,000. This potent greenhouse gas has a rising atmospheric abundance due to its emission from a growing number of manufacturing processes and an expanding end-use market. Here we present a modified version of the "Medusa" preconcentration gas chromatography/mass spectrometry (GC/MS) system of Miller, B. R.; Weiss, R. F.; Salameh, P. K.; Tanhua, T.; Greally, B. R.; Muhle, J.; Simmonds, P. G. Anal. Chem.2008, 80 (5), 1536-1545. By altering the techniques of gas separation and chromatography after initial preconcentration, we are now able to make atmospheric measurements of NF(3) with relative precision <2% (1sigma) for current background clean air samples. Importantly, this method augments the currently operational Medusa system, so that the quality of data for species already being measured is not compromised and NF(3) is measured from the same preconcentrated sample. We present the first in situ measurements of NF(3) from La Jolla, California made 11 times daily, illustrating how global deployment of this technique within the AGAGE (Advanced Global Atmospheric Gases Experiment) network could facilitate estimation of global and regional NF(3) emissions over the coming years.|A dual-channel gas chromatographic method is described in this paper that can be conveniently used for quantitation of NF3/CF4 mixtures with a thermal conductivity detector (TCD) on one channel for the quantitation of high-concentrations, and a pulsed discharge helium ionization detector (PDHID) on a second channel for the quantitation of low concentrations. It is shown that adequate separation is achieved on both channels with this dual single-column setup in which column switching as used for NF3/CF4 analysis in industrial chromatographic methods are not required, thus yielding an effective analysis method for laboratory-scale investigations. In addition, the use of packed columns with purified divinylbenzene-styrene co-polymers as the sole stationary phase yields satisfactory resolution between NF3 and CF4 at isothermal conditions of 30 °C, with elution times of less than 8min on the TCD channel and less than 4min on the PDHID channel. Consequently, this method allows for reliable, straight-forward quantitation of NF3/CF4 mixtures, which is necessary when studying the commercially important problem of NF3 and CF4 separation by different methods. Therefore, the applicability of the method to studying membrane separation of NF3 and CF4 is briefly discussed and illustrated, for which the dual-channel setup is especially beneficial.