Ethyltrichlorosilane

163.51

163.51

204-072-6

6Q81CH0W5Z

1196

DTXSID7026940

Liquid|COLORLESS LIQUID

2931 90 00

0

4.72

colorless liquid

1.2381 g/cm³ @ Temp: 20 °C

-105.6 °C

97.9 °C @ Press: 760 Torr

57 °F

n 20/D 1.425(lit.)

SOL IN BENZENE, ETHER, HEPTANE, PERCHLOROETHYLENE

Store below +30°C.

36 hPa (20 °C)

5.6 (Air = 1)

Oral-Rat LD50: 1330 mg/kg; Inhalation-Rat: 500 PPM/ 4 hours

It is flammable in case of open flame, high temperature and oxidant; high temperature decomposes toxic phosgene; emits poisonous mist of chloride in water

2.68%(V)

READILY HYDROLYZED WITH LIBERATION OF HYDROGEN CHLORIDE|Decomposes in water and alcohol|The reaction of organosilanes with halogens and halogen cmpd usually proceeds in good yield through cleavage of the Si--H bond and formation of the silicon-halogen bond. Reaction with fluorine, however, does not proceed satisfactorily because of cleavage of not only the Si--H but also C--Si and C--H bonds. Direct halogenation with chlorination, bromine, and iodine proceeds smoothly, however. /Organosilanes/

Highly flammable. Reacts violently with water, steam, moist air, alcohols, acetone, light metals with generation of heat and combustible (H2) and corrosive (HCl) gases. On contact with moist air it gives off HCl gas. [Handling Chemicals Safely 1980. p. 924]. It is readily hydrolyzed with the liberation of hydrogen chloride [Hawleys]. Ethyltrichlorosilane reacts vigorously with water to generate gaseous HCl. Based on a scenario where the chemical is spilled into an excess of water (at least 5 fold excess of water), half of the maximum theoretical yield of Hydrogen Chloride gas will be created in 0.45 minutes. After mixing particular chemicals into water, there may be a delay of <1-10 minutes before gas generation may be observed. For this chemical, a 5 second induction time was observed. Experimental details are in the following: "Development of the Table of Initial Isolation and Protective Distances for the 2008 Emergency Response Guidebook", ANL/DIS-09-2, D.F. Brown, H.M. Hartmann, W.A. Freeman, and W.D. Haney, Argonne National Laboratory, Argonne, Illinois, June 2009.

Chlorosilanes

Highly Flammable

Chlorosilanes, such as ETHYLTRICHLOROSILANE, are compounds in which silicon is bonded to from one to four chlorine atoms with other bonds to hydrogen and/or alkyl groups. Chlorosilanes react with water, moist air, or steam to produce heat and toxic, corrosive fumes of hydrogen chloride. They may also produce flammable gaseous H2. They can serve as chlorination agents. Chlorosilanes react vigorously with both organic and inorganic acids and with bases to generate toxic or flammable gases.

Corrosive

9,457.8 gcal/gmol

Critical temperature: 286.8 °C; Critical Pressure: 32.9 atm

II

3.1

UN 1196 3/PG 2

1

11-14-22-26-34-37-35-20/22

26-28-36/37/39-45

VV4200000

F,T+,C

The warehouse is ventilated, low temperature and dry; stored separately from oxidants and acids

P210, P233, P240, P241, P242, P243, P260, P264, P270, P280, P301+P312, P301+P330+P331, P303+P361+P353, P304+P340, P305+P351+P338, P310, P321, P330, P363, P370+P378, P403+P235, P405, P501

H225

SRP: The most favorable course of action is to use an alternative chemical product with less inherent propensity for occupational harm/injury/toxicity or environmental contamination. Recycle any unused portion of the material for its approved use or return it to the manufacturer or supplier. Ultimate disposal of the chemical must consider: the material's impact on air quality; potential migration in soil or water; effects on animal and plant life; and conformance with environmental and public health regulations.|Dissolve in a combustible solvent. Scatter the spray to the solution into the furnace with afterburner and alkali scrubber.

Will react with water or steam to produce heat and toxic and corrosive fumes. Can react vigorously with oxidizing materials.|Reacts with water to produce hydrogen chloride. Reacts violently with a broad range of materials.|Reacts with surface moisture to form hydrogen chloride, which is corrosive to common metals.

Trichloroethylsilane may form explosive mixtures with air. Its vapors are heavier than air and may travel a considerable distance to a source of ignition and flash back. Form toxic and corrosive fumes including phosgene when heated to decomposition and hydrochloric acid in presence of water. Will react with water or steam to produce heat and toxic and corrosive fumes. Will react vigorously with oxidizing materials. Unstable, avoid decomposing heat. (EPA, 1998)|Corrosives, Flammable - 3rd degree, Reactive - 2nd degree

|Danger|H225 (100%): Highly Flammable liquid and vapor [Danger Flammable liquids]|P210, P233, P240, P241, P242, P243, P260, P261, P264, P270, P271, P280, P301+P312, P301+P330+P331, P303+P361+P353, P304+P340, P305+P351+P338, P310, P311, P321, P330, P363, P370+P378, P403+P233, P403+P235, P405, and P501|Aggregated GHS information provided by 86 companies from 6 notifications to the ECHA C&L Inventory. Each notification may be associated with multiple companies.|H225: Highly Flammable liquid and vapor [Danger Flammable liquids]|P210, P233, P240, P241, P242, P243, P260, P264, P270, P280, P301+P312, P301+P330+P331, P303+P361+P353, P304+P340, P305+P351+P338, P310, P321, P330, P363, P370+P378, P403+P235, P405, and P501

Excerpt from ERG Guide 155 [Substances - Toxic and/or Corrosive (Flammable / Water-Sensitive)]: As an immediate precautionary measure, isolate spill or leak area in all directions for at least 50 meters (150 feet) for liquids and at least 25 meters (75 feet) for solids. SPILL: See ERG Table 1 - Initial Isolation and Protective Action Distances on the UN/NA 1196 datasheet. FIRE: If tank, rail car or tank truck is involved in a fire, ISOLATE for 800 meters (1/2 mile) in all directions; also, consider initial evacuation for 800 meters (1/2 mile) in all directions. (ERG, 2016)

Excerpt from ERG Guide 155 [Substances - Toxic and/or Corrosive (Flammable / Water-Sensitive)]: ELIMINATE all ignition sources (no smoking, flares, sparks or flames in immediate area). All equipment used when handling the product must be grounded. Do not touch damaged containers or spilled material unless wearing appropriate protective clothing. Stop leak if you can do it without risk. A vapor-suppressing foam may be used to reduce vapors. FOR CHLOROSILANES, use AFFF alcohol-resistant medium-expansion foam to reduce vapors. DO NOT GET WATER on spilled substance or inside containers. Use water spray to reduce vapors or divert vapor cloud drift. Avoid allowing water runoff to contact spilled material. Prevent entry into waterways, sewers, basements or confined areas. SMALL SPILL: Cover with DRY earth, DRY sand or other non-combustible material followed with plastic sheet to minimize spreading or contact with rain. Use clean, non-sparking tools to collect material and place it into loosely covered plastic containers for later disposal. (ERG, 2016)

For emergency situations, wear a positive pressure, pressure-demand, full facepiece self-contained breathing apparatus (SCBA) or pressure- demand supplied air respirator with escape SCBA and a fully-encapsulating, chemical resistant suit. (EPA, 1998)|Those who have to handle ... /chlorosilanes/ should wear goggles and if necessary a /NIOSH approved respirator/. Handling should be done as far as possible under suitably ventilated hoods. /Chlorosilanes/|Acid-vapor-type respiratory protection; rubber gloves; chemical worker's goggles; other equipment as necessary to protect skin and eyes.

Flammable liquid|A very dangerous fire hazard when exposed to heat, flame, or oxidizers.

Lower explosive limit: 3.4%; Upper explosive limit: > or = 9.5%|May form explosive mixture with air.

If material on fire or involved in fire: do not extinguish fire unless flow can be stopped; use "alcohol" foam, dry chemical, or carbon dioxide; cool all affected containers with flooding quantities of water; apply water from as far a distance as possible; do not use water on material itself; if large quantities of combustibles are involved, use water in flooding quantities as spray and fog; use water spray to knock down vapors.|Wear positive pressure self-contained breathing apparatus ... Wear appropriate chemical protective clothing.|Fire may restart after it has been extinguished. Vapors are heavier than air and will collect in low areas. Vapors may travel long distances to ignition sources and flashback. Vapors in confined areas may explode when exposed to fire. Containers may explode in fire. Storage containers and parts of containers may rocket great distances, in many directions. If material or contaminated runoff enters waterways, notify downstream users of potentially contaminated waters. Notify local health and fire officials and pollution control agencies. From a secure, explosion-proof location, use water spray to cool exposed containers. If cooling streams are ineffective (venting sound increases in volume and pitch, tank discolors or shows any signs of deforming), withdraw immediately to a secure position.

Vapors are heavier than air and may travel to a source of ignition and flash back.|Difficult to extinguish; re-ignition may occur. Contact with water applied to adjacent fires will produce irritating hydrogen chloride fumes.

SRP: Wastewater from contaminant suppression, cleaning of protective clothing/equipment, or contaminated sites should be contained and evaluated for subject chemical or decomposition product concentrations. Concentrations shall be lower than applicable environmental discharge or disposal criteria. Alternatively, pretreatment and/or discharge to a permitted wastewater treatment facility is acceptable only after review by the governing authority and assurance that "pass through" violations will not occur. Due consideration shall be given to remediation worker exposure (inhalation, dermal and ingestion) as well as fate during treatment, transfer and disposal. If it is not practicable to manage the chemical in this fashion, it must be evaluated in accordance with EPA 40 CFR Part 261, specifically Subpart B, in order to determine the appropriate local, state and federal requirements for disposal.|Evacuate and restrict persons not wearing protective equipment from area of spill or leak until cleanup is complete. Remove all ignition sources. Ventilate area of spill or leak. Absorb liquids in vermiculite, dry sand, earth, peat, carbon, or a similar material and deposit in sealed containers. Keep this chemical out of a confined space, such as a sewer, because of the possibility of an explosion, unless the sewer is designed to prevent the build-up of explosive concentrations. It may be necessary to contain and dispose of this chemical as a hazardous waste. If material or contaminated runoff enters waterways, notify downstream users of potentially contaminated waters.|Eliminate all ignition sources. Stop or control the leak, if this can be done without undue risk. Use water spray to cool and disperse vapors and protect personnel. Control runoff and isolate discharged material for proper disposal.|Absorb the spills with paper towels or the like materials. Place in hood to evaporate. Dispose by burning the towel.

SRP: The scientific literature for the use of contact lenses by industrial workers is inconsistent. The benefits or detrimental effects of wearing contact lenses depend not only upon the substance, but also on factors including the form of the substance, characteristics and duration of the exposure, the uses of other eye protection equipment, and the hygiene of the lenses. However, there may be individual substances whose irritating or corrosive properties are such that the wearing of contact lenses would be harmful to the eye. In those specific cases, contact lenses should not be worn. In any event, the usual eye protection equipment should be worn even when contact lenses are in place.|SRP: Contaminated protective clothing should be segregated in a manner that results in no direct personal contact by personnel who handle, dispose of, or clean the clothing. Quality assurance procedures to confirm the efficacy of the cleaning procedures should be implemented prior to the decontaminated protective clothing being returned for reuse by the workers. Contaminated clothing (including shoes/socks) should not be taken home at end of shift, but should remain at employee's place of work for cleaning.|SRP: Local exhaust ventilation should be applied wherever there is an incidence of point source emissions or dispersion of regulated contaminants in the work area. Ventilation control of the contaminant as close to its point of generation is both the most economical and safest method to minimize personnel exposure to airborne contaminants. Ensure that the local ventilation moves the contaminant away from the worker.|Contact lenses should not be worn when working with this chemical.|For more Preventive Measures (Complete) data for Trichloroethylsilane (7 total), please visit the HSDB record page.

If ... THERE IS NO FIRE, go directly to the Table of Initial Isolation and Protective Action Distances /(see table below)/ ... to obtain initial isolation and protective action distances. IF THERE IS A FIRE, or IF A FIRE IS INVOLVED, go directly to the appropriate guide /(see guide(s) below)/ and use the evacuation information shown under PUBLIC SAFETY. /Ethyltrichlorosilane (when spilled in water)/|Table of Water-Reactive Materials Which Produce Toxic Gases|/GUIDE 155: SUBSTANCES - TOXIC AND/OR CORROSIVE (FLAMMABLE/WATER-SENSITIVE)/ Fire or Explosion: HIGHLY FLAMMABLE: Will be easily ignited by heat, sparks or flames. Vapors form explosive mixtures with air: indoors, outdoors and sewers explosion hazards. Most vapors are heavier than air. They will spread along ground and collect in low or confined areas (sewers, basements, tanks). Vapors may travel to source of ignition and flash back. Those substances designated with a "P" may polymerize explosively when heated or involved in a fire. Substance will react with water (some violently) releasing flammable, toxic or corrosive gases and runoff. Contact with metals may evolve flammable hydrogen gas. Containers may explode when heated or if contaminated with water.|/GUIDE 155: SUBSTANCES - TOXIC AND/OR CORROSIVE (FLAMMABLE/WATER-SENSITIVE)/ Health: TOXIC; inhalation, ingestion or contact (skin, eyes) with vapors, dusts or substance may cause severe injury, burns, or death. ... Reaction with water or moist air will release toxic, corrosive or flammable gases. Reaction with water may generate much heat which will increase the concentration of fumes in the air. Fire will produce irritating, corrosive and/or toxic gases. Runoff from fire control or dilution water may be corrosive and/or toxic and cause pollution.|For more DOT Emergency Guidelines (Complete) data for Trichloroethylsilane (10 total), please visit the HSDB record page.

No person may /transport,/ offer or accept a hazardous material for transportation in commerce unless that person is registered in conformance ... and the hazardous material is properly classed, described, packaged, marked, labeled, and in condition for shipment as required or authorized by ... /the hazardous materials regulations (49 CFR 171-177)./|The International Air Transport Association (IATA) Dangerous Goods Regulations are published by the IATA Dangerous Goods Board pursuant to IATA Resolutions 618 and 619 and constitute a manual of industry carrier regulations to be followed by all IATA Member airlines when transporting hazardous materials.|The International Maritime Dangerous Goods Code lays down basic principles for transporting hazardous chemicals. Detailed recommendations for individual substances and a number of recommendations for good practice are included in the classes dealing with such substances. A general index of technical names has also been compiled. This index should always be consulted when attempting to locate the appropriate procedures to be used when shipping any substance or article.

Irritating to eyes, nose, and throat. Harmful if inhaled.|Hazard warning: the vapors have adequate warning properties of irritation of the eye, nose, and respiratory passages before sufficient exposure occurs to cause injury to the eyes. The principal danger is from splash contamination. /Chlorosilanes/|Causes severe eye and skin burns. Serious health hazard. May be harmful if inhaled. Irritating to eye, skin, and respiratory system. /Dimethylchlorosilane/|A skin and severe eye irritant.|/SRP: All chlorosilanes release hydrogen chloride in the presence of water/water vapor./ All the chlorosilanes were found to cause severe damage of the cornea and lids. More severe damage was caused by the alkylchlorosilanes than by tetrachlorosilane (silicone tetrachloride). The principal danger is from splash contamination. /Chlorosilanes/|Strong irritant.

| 3 - Materials that, under emergency conditions, can cause serious or permanent injury.| 3 - Liquids and solids that can be ignited under almost all ambient temperature conditions. Materials produce hazardous atmospheres with air under almost all ambient temperatures or, though unaffected by ambient temperatures, are readily ignited under almost all conditions.| 2 - Materials that readily undergo violent chemical changes at elevated temperatures and pressures.

D003; A waste containing trichloroethylsilane may (or may not) be characterized a hazardous waste following testing for the reactivity characteristics as prescribed by the Resource Conservation and Recovery Act (RCRA) regulations.

Releases of CERCLA hazardous substances are subject to the release reporting requirement of CERCLA section 103, codified at 40 CFR part 302, in addition to the requirements of 40 CFR part 355. Trichloroethylsilane is an extremely hazardous substance (EHS) subject to reporting requirements when stored in amounts in excess of its threshold planning quantity (TPQ) of 500 lbs.

D003; A solid waste containing trichloroethylsilane may become characterized as a hazardous waste when subjected to testing for reactivity as stipulated in 40 CFR 261.23, and if so characterized, must be managed as a hazardous waste.

moderately toxic

LD50 Rat oral 1,330 mg/kg|LD50 Rat ip approx 1.0 g/kg|LD50 Rat oral 0.8 g/kg|LC50 Rat inhalation 1257 ppm for 1 hr (95% confidence limits 1175-1320 ppm)|LC50 Mouse inhalation 300 ug/cu m

Chlorosilane compounds' production and use as intermediates for silicone products may result in their release to the environment through various waste streams. However, these compounds decompose to release hydrogen chloride upon contact with water or steam. Therefore, volatilization, biodegradation, and bioconcentration are not expected to be important environmental fate processes. /Chlorosilanes/ (SRC)

Silane compounds decompose upon contact with water or steam to produce heat and toxic and corrosive fumes of hydrogen chloride. Silane ignites spontaneously in air(1,2). With a little ammonia, it forms a self-igniting product(1). /Chlorosilanes/

According to the 2006 TSCA Inventory Update Report, the number of persons reasonably likely to be exposed in the industrial manufacturing, processing, and use for trichloroethylsilane is 100-999; the data may be greatly underestimated(1).

... Chlorosilanes will be rapidly hydrolyzed upon contact with tissue fluids to release hydrochloric acid. /Chlorosilanes/

Vapor and liquid cause burns. Do not inhale or expose eyes to vapor. Vapor may damage eyes even if not immediately painful. (EPA, 1998)

Signs and Symptoms of Acute Trichloroethylsilane Exposure: Signs and symptoms of acute ingestion of trichloroethylsilane may be severe, and include increased salivation, intense thirst, difficulty swallowing, chills, pain, and shock. Oral, esophageal, and stomach burns are common. Vomitus generally has a coffee-ground appearance. The potential for circulatory collapse is high following ingestion of trichloroethylsilane. Acute inhalation exposure may result in sneezing, choking, laryngitis, dyspnea (shortness of breath), respiratory tract irritation, and chest pain. Bleeding of nose and gums, ulceration of the nasal and oral mucosa, pulmonary edema, chronic bronchitis, and pneumonia may also occur. Renal toxicity has been observed in animals. If the eyes have come in contact with trichloroethylsilane, then irritation, pain (may be delayed in the case of vapor exposure), swelling, corneal erosion, and blindness may result. Severe burns, pain, shock, and dermatitis (red, inflamed skin) generally follow dermal exposure. Emergency Life-Support Procedures: Acute exposure to trichloroethylsilane may require decontamination and life support for the victims. Emergency personnel should wear protective clothing appropriate to the type and degree of contamination. Air-purifying or supplied-air respiratory equipment should also be worn, as necessary. Rescue vehicles should carry supplies such as plastic sheeting and disposable plastic bags to assist in preventing spread of contamination. Inhalation Exposure: 1. Move victims to fresh air. Emergency personnel should avoid self-exposure to trichloroethylsilane. 2. Evaluate vital signs including pulse and respiratory rate, and note any trauma. If no pulse is detected, provide CPR. If not breathing, provide artificial respiration. If breathing is labored, administer oxygen or other respiratory support. 3. Obtain authorization and/or further instructions from the local hospital for administration of an antidote or performance of other invasive procedures. 4. RUSH to a health care facility. Dermal/Eye Exposure: 1. Remove victims from exposure. Emergency personnel should avoid self- exposure to trichloroethylsilane. 2. Evaluate vital signs including pulse and respiratory rate, and note any trauma. If no pulse is detected, provide CPR. If not breathing, provide artificial respiration. If breathing is labored, administer oxygen or other respiratory support. 3. Remove contaminated clothing as soon as possible. 4. If eye exposure has occurred, eyes must be flushed with lukewarm water for at least 15 minutes. 5. Wash exposed skin areas THOROUGHLY with soap and water. 6. Obtain authorization and/or further instructions from the local hospital for administration of an antidote or performance of other invasive procedures. 7. RUSH to a health care facility. Ingestion Exposure: 1. Evaluate vital signs including pulse and respiratory rate, and note any trauma. If no pulse is detected, provide CPR. If not breathing, provide artificial respiration. If breathing is labored, administer oxygen or other respiratory support. 2. Rinse mouth with large amounts of water. Victims should not attempt to swallow this water. 3. DO NOT induce vomiting or attempt to neutralize! 4. Obtain authorization and/or further instructions from the local hospital for administration of an antidote or performance of other invasive procedures. 5. Activated charcoal is of no value. 6. Give the victims water or milk: children up to 1 year old, 125 mL (4 oz or 1/2 cup); children 1 to 12 years old, 200 mL (6 oz or 3/4 cup); adults, 250 mL (8 oz or 1 cup). Water or milk should be given only if victims are conscious and alert. 7. RUSH to a health care facility. (EPA, 1998)

Immediate first aid: Ensure that adequate decontamination has been carried out. If patient is not breathing, start artificial respiration, preferably with a demand-valve resuscitator, bag-valve-mask device, or pocket mask, as trained. Perform CPR as necessary. Immediately flush contaminated eyes with gently flowing water. Do not induce vomiting. If vomiting occurs, lean patient forward or place on left side (head-down position, if possible) to maintain an open airway and prevent aspiration. Keep patient quiet and maintain normal body temperature. Obtain medical attention. /Silane, Chlorosilane, and Related Compounds/|Basic treatment: Establish a patent airway (oropharyngeal or nasopharyngeal airway, if needed). Suction if necessary. Watch for signs of respiratory insufficiency and assist ventilations if necessary. Administer oxygen by nonrebreather mask at 10 to 15 L/min. Monitor for pulmonary edema and treat if necessary ... . Anticipate seizures and treat if necessary ... . Monitor for shock and treat if necessary ... . For eye contamination, flush eyes immediately with water. Irrigate each eye continuously with 0.9% saline (NS) during transport ... . Do not use emetics. For ingestion, rinse mouth and administer 5 ml/kg up to 200 ml of water for dilution if the patient can swallow, has a strong gag reflex, and does not drool. Administer activated charcoal (refer to ingestion protocol in Section Three ... . Cover skin burns with sterile dressings after decontamination ... . /Silane, Chlorosilane, and Related Compounds/|Advanced treatment: Consider orotracheal or nasotracheal intubation for airway control in the patient who is unconscious, has severe pulmonary edema, or is in severe respiratory distress. Early intubation at the first sign of upper airway obstruction may be necessary. Positive-pressure ventilation techniques with a bag-valve-mask device may be beneficial. Consider drug therapy for pulmonary edema ... . Monitor cardiac rhythm and treat arrhythmias if necessary ... . Start IV administration of D5W /SRP: "To keep open", minimal flow rate/. Use 0.9% saline (NS) or lactated Ringer's (LR) if signs of hypovolemia are present. For hypotension with signs of hypovolemia, administer fluid cautiously. Consider vasopressors if patient is hypotensive with a normal fluid volume. Watch for signs of fluid overload ... . Treat seizures with diazepam or lorazepam ... . Use proparacaine hydrochloride to assist eye irrigation ... . /Silane, Chlorosilane, and related compounds/

/SIGNS AND SYMPTOMS/ Acute inhalation exposure may result in sneezing, choking, laryngitis, dyspnea (shortness of breath), respiratory tract irritation, and chest pain. Higher exposure can cause pulmonary edema, a medical emergency that can be delayed for several hours. This can cause death. Bleeding of nose and gums, ulceration of the nasal and oral mucosa, pulmonary edema, chronic bronchitis, and pneumonia may also occur. If the eyes have come in contact with dimethyldichlorosilane, irritation, pain, swelling, corneal erosion, and blindness may result. Dermatitis (red, inflamed skin), severe burns, pain, and shock generally follow dermal exposure. Inhalation irritates mucous membranes. Severe gastrointestinal damage may occur. Vapors cause severe eye and lung injury. Upon short contact, second and third degree burns may occur. Signs and symptoms of acute ingestion of dimethyldichlorosilane may be severe and include increased salivation, intense thirst, difficulty swallowing, chills, pain, and shock. Oral, esophageal, and stomach burns are common. /Dimethyldichlorosilane/|/SIGNS AND SYMPTOMS/ Inhalation irritates mucous membranes. Contact with liq causes severe burns of eyes and skin ... Vapors cause severe irritation of eyes and throat and can cause eye and lung injury. They cannot be tolerated even at low concn. Causes second- and third-degree burns on short contact ...|/SIGNS AND SYMPTOMS/ Causes severe eye and skin burns. Serious health hazard. May be harmful if inhaled. Irritating to eye, skin, and respiratory system. /Dimethylchlorosilane/|/SIGNS AND SYMPTOMS/ Short Term Exposure: Ethyltrichlorosilane can affect you when breathed in. Ethyltrichlorosilane is a corrosive chemical and contact can cause skin and eye burns. Exposure can irritate the respiratory tract. Exposure can irritate the lungs causing coughing and/or shortness of breath. Higher exposures can cause pulmonary edema, a medical emergency that can be delayed for several hours. This can cause death. Long Term Exposure: May cause kidney damage. Highly irritating substances can cause lung irritation and bronchitis.|For more Human Toxicity Excerpts (Complete) data for Trichloroethylsilane (6 total), please visit the HSDB record page.

All other basic inorganic chemical manufacturing|Silane, trichloroethyl-: ACTIVE

Fire Hazards -> Corrosives, Flammable - 3rd degree, Reactive - 2nd degree